基于硅MEMS腔体技术的微波带通滤波器  

Microwave Band-Pass Filters Based on the Silicon MEMS Cavity Technology

作　　者：陈熙[1] 李丰[1] 马文涛[1] 李宏军[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2015年第5期299-303,共5页Micronanoelectronic Technology

摘　　要：基于硅MEMS腔体技术的微波带通滤波器是微波通信系统中的关键器件。开发了一种利用硅MEMS腔体技术制作的微波带通滤波器。采用梳状结构四分之一波长谐振器级联形成微波带通滤波器,利用全波三维电磁场仿真设计软件进行了设计、建模、仿真和优化,并使用微机械加工(MEMS)工艺技术在高阻硅衬底上加工,形成滤波器。仿真和实测结果表明,硅MEMS腔体带通滤波器的尺寸仅为8 mm×4 mm×0.8 mm,质量不足0.1 g,并且所得仿真和实测性能结果一致性较好。与传统的金属矩形/圆形波导滤波器以及LC滤波器相比,硅MEMS腔体带通滤波器的体积和质量是前者的几百分之一。此外硅MEMS腔体带通滤波器还具有高抑制度、一致性好及易于集成等优点。Microwave band-pass filters based on the silicon MEMS cavity technology are the key devices in microwave communication systems. A kind of microwave band-pass filter was developed with the silicon MEMS cavity technology. The microwave hand-pass filter consisting of the cascaded resonators with the 1/4 wave length comb structure was designed, modeled, simulated and optimized by the full-wave 3D electromagnetic field simulation and design software. The filter was realized by the MEMS technology on the high resistivity silicon substrate. The simulated and measured results show that the size of the microwave band-pass filter based on the silicon MEMS cavity is only 8 mm × 4 mm ×0.8 mm, the mass is less than 0.1 g, and the performance results of the simulation and actual tests have good consistency. Compared with the traditional microwave filters utilizing metallic rectangular/circular waveguides or LC components, the size and mass of the band-pass filters based on the silicon MEMS cavity technology are a part in several hundreds of those of the formers. Besides, the band-pass filters based on the silicon MEMS cavity technology have many advantages such as high suppression degree, excellent consistency and easy integration, etc.

关 键 词：硅MEMS腔体 硅体微加工 带通滤波器 梳状结构 谐振器 

分 类 号：TH703[机械工程—仪器科学与技术] TN713.5[机械工程—精密仪器及机械]