W18Cr4V高速钢衬底CVD金刚石涂层沉积技术研究  

Research on Deposition Technology of CVD Diamond Coating on W18Cr4V High-speed Steel Substrate

作　　者：马玉平[1] 王金龙[1,2] 

机构地区：[1]安徽建筑大学机械与电气工程学院,合肥230601 [2]安徽建筑大学材料与化学工程学院,合肥230601

出　　处：《人工晶体学报》2015年第4期1041-1045,1055,共6页Journal of Synthetic Crystals

基　　金：国家自然科学基金(50675134);安徽省自然科学基金(1208085ME63);安徽省教育厅自然科学基金(KJ2010B045)

摘　　要：研究了通过热丝CVD法在施加了Ni-P/Cu复合中间过渡层的W18Cr4V高速钢衬底表面进行金刚石涂层的沉积技术以及不同压力条件对沉积出的CVD金刚石涂层质量的影响。最后通过扫描电镜分别对Cu、Ni-P以及不同反应压力下沉积的金刚石涂层的表面形貌进行了检测分析,通过XRD、拉曼光谱仪、洛氏硬度仪对金刚石涂层性能进行检测分析。结果表明:Ni-P/Cu复合中间过渡层可以明显的抑制Fe、Co的催石墨化作用。在此基础上通过沉积参数的优化,在W18Cr4V高速钢衬底表面成功沉积出高质量的CVD金刚石涂层。压力为4 kPa条件下沉积的CVD金刚石涂层较5 k Pa的金刚石颗粒晶型明显、分布致密。The deposition technology of CVD diamond coating on the W18Cr4 V high speed steel substrate with Ni-P / Cu intermediate transition layer was investigated. The influence of different deposition pressures on the quality of CVD diamond coating was also researched. The surface morphology of Ni-P alloy layer,Cu layer and the diamond coating were analyzed by scanning electron microscopy（ SEM） testing instrument,respectively. The property of diamond coating was tested by XRD,Raman spectroscopy,Rockwell hardness tester. The results show that the Ni-P / Cu intermediate transition layer can inhibit catalytic effect caused by Fe and Co. High quality of CVD diamond coating was deposited on W18Cr4 V high speed steel substrate by optimizing the deposition parameters. The CVD diamond coating deposited under 4 k Pa has better diamond particles and higher distribution density than that under 5 k Pa.

关 键 词：高速钢衬底 Ni-P/Cu复合中间过渡层 CVD金刚石涂层 

分 类 号：TG174[金属学及工艺—金属表面处理]