离线式TCO镀膜玻璃炸裂的原因及对策  

Causes and Countermeasures of off Line TCO Coating Glass Crack

作　　者：蒋振伟[1] 薛文鑫[1] 

机构地区：[1]河南安彩高科股份有限公司,河南安阳455000

出　　处：《安阳工学院学报》2015年第2期35-37,共3页Journal of Anyang Institute of Technology

摘　　要：阐述了采用n AERO辅助气溶胶薄膜沉积技术制备TCO镀膜玻璃时,在TCO玻璃生产线上出现的玻璃连续炸裂的问题,通过分析和多次对加热炉温度曲线、气浮台高度、镀膜腔室尾气排放量、加热炉与镀膜腔室间隙等工艺及设备调整,对可能存在的原因逐一排查,最终确定炸裂的主要因素,并加以改进,使离线式TCO镀膜玻璃炸裂问题得到了最终解决。This paper elaborates glass continuous cracking problem occurred on TCO product line when glass coated by nAERO auxiliary aerosol thin film deposition process equipment and analyses the measures. Through many times of adjusting process and equipment, such as heating furnace temperature, airbed height, exhaust emission of coating chamber, gap between furnace and coating chamber in order to check possible reasons one by one, finally confirm the main factor of glass cracking and work out solution so that glass cracking happened on TCO off-line coating could be final solved.

关 键 词：nAERO辅助气溶胶薄膜沉积技术 离线式TCO镀膜玻璃 玻璃炸裂 冷风 

分 类 号：TQ171[化学工程—玻璃工业]