一种离子流束斑形状的快速检测方法  

Fast Measurement Method of Ion Beam Spot

作　　者：包泽民[1] 刘光达[1] 王培智[1] 龙涛[2] 田地[1] 邱春玲[1] 刘敦一[2] 

机构地区：[1]吉林大学仪器科学与电气工程学院,吉林长春130061 [2]中国地质科学院地质研究所,北京100037

出　　处：《质谱学报》2015年第3期274-281,共8页Journal of Chinese Mass Spectrometry Society

基　　金："国家重大科学仪器设备开发专项"<同位素地质学专用TOF-SIMS科学仪器>(2011YQ050069;2011YQ05006906)资助

摘　　要：针对当前质谱仪研制及调试过程中离子束斑形状检测方法繁琐、效率低等问题,提出一种快速、实时的检测方法。该方法在传统刀边法的基础上,采用多角度切割线包围成图原理,即分别在0°、45°、90°、135°方向移动锋利刀边"切割"离子束,得出离子流强度变化曲线,最终还原离子束斑形状及束流核心区域。通过自行搭建的测试平台,将该方法得到的束斑形状与离子轰击痕迹法的结果进行对比,结果表明,采用本方法检测得到的离子束斑形状及核心区域与离子轰击痕迹法基本一致,但较后者操作简单、省时高效,可实现实时检测。In order to solve the difficult problem of ion beam spot measurement and pro filing in research and adjustment of mass spectrometers, such as low efficiency, tedious process, difficult operation and so on, a method of fast beam spot shape measurement was proposed. Based on the conventional knife-edge method, a multi-angle cutting-line image forming principle was developed. Through sharp knife edge ＂cutting＂ ion beam in 0° , 45°, 90° and 135° directions respectively, ion current intensity curves were ob- tained. Finally, the image of ion beam spot shape and core area could be formed. Through the self-built experimental platform, the ion beam spot shape and core area of this method were compared with that of ion bombardment imaging method. Experi- ments show that the results of multi-angle cutting-line image forming method are inclose agreement with ion bombardment imaging method one. However, this method is of simple operation, time saving and high efficiency, which can realize real-time detection.

关 键 词：质谱仪 离子束斑 束斑形状 多角度切割线包围成图原理 

分 类 号：O657.63[理学—分析化学]