干刻蚀机零件锈蚀原因分析  

Analysis on Corrosion Cause of Dry Etched Machine Parts

作　　者：彭小钢[1] 曹标[1] 

机构地区：[1]广东出入境检验检疫局检验检疫技术中心,广州510623

出　　处：《理化检验（物理分册）》2015年第5期358-360,共3页Physical Testing and Chemical Analysis(Part A:Physical Testing)

摘　　要：运用宏观和微观分析,并通过模拟试验对干刻蚀机的部分零件锈蚀的原因进行了分析。结果表明:零件锈蚀为潮湿大气所致;部分零件镀层质量不良导致耐腐蚀性能下降,从而加速了锈蚀的产生。Corrosion cause of some parts of a dry etched machine was analyzed by means of macroscopic observation, microscopic examination and simulation test. The results showed that the corrosion was caused by wet atmosphere. And the poor coating quality of some parts reduced to corrosion resistance and accelerated the corrosion of the parts.

关 键 词：干刻蚀机 零件 锈蚀 大气 耐腐蚀性 

分 类 号：TG172.3[金属学及工艺—金属表面处理]