凸非球面背向零位补偿检验的设计方法  

Design of Back Null Compensator Test Method of Convex Aspherical Surface

作　　者：叶璐[1] 张金平[1] 郑列华[1] 郝沛明[2] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083 [2]同济大学,上海200083

出　　处：《光子学报》2015年第4期148-153,共6页Acta Photonica Sinica

基　　金：国家重点基础研究发展计划(No.2011CB013206)资助

摘　　要：为了实现大口径凸非球面的高准确度检测,提出了凸非球面背向零位补偿检验方法.该方法在非球面背面引入辅助球面并在光路中加入球面补偿透镜来达到零位补偿检验.辅助球面既可以使凸非球面等效为凹非球面,还可以补偿部分非球面法线像差.依据三级像差理论,对辅助球面曲率半径及补偿透镜结构参量进行初始结构求解,并编写了求解初始结构软件,再利用光学设计软件对初始结构进行优化,优化结果满足设计要求,使凸非球面背向零位补偿检验理论化.在实际应用中,以Φ120mm凸非球面为例设计了凸非球面背向零位补偿检测系统,检测系统设计的剩余波像差PV为0.024λ、RMS为0.007λ.利用此检测方法加工完成后的凸非球面的面形准确度优于λ/40.In order to measure a convex aspherical surface with large aperture,back null compensator test method was proposed.By introducing an auxiliary spherical surface at the back of convex aspherical surface and introducing spherical compensator in optic system,this novel test method is able to realize null test.The auxiliary spherical surface is not only essential to form an aspherical lens with convex aspherical surface,but also can compensate part of normal aberration of convex aspherical surface.Based on the third-order aberration theory,the radii of auxiliary spherical surface and optical parameter of compensator of initial system are calculated.By using commercial optical design soft the initial system is optimized and back null compensator is designed.An aspherical surface with 120 mm diameter is tested to prove the practicability of this method.As the result,the residual wavefront error is smaller than 0.007λrms（PV0.024λ）.The precision of convex aspherical surface which is measured by this method is better than 1/40λ.

关 键 词：几何光学 辅助面补偿 零位补偿 凸非球面检测 

分 类 号：TN247[电子电信—物理电子学] O435.2[机械工程—光学工程]