TiAlCNO过渡层组织结构及其对Al_2O_3涂层结构性能的影响  

Microstructure of TiAlCNO Intermediate Layer and Its Influence on Microstructure and Properties of Al_2O_3 Coating

作　　者：刘王平[1,2] 陈响明[1,2] 魏秋平[3] 王社权[1,2] 周文豪[1,2] 

机构地区：[1]株洲钻石切削刀具股份有限公司,湖南株洲412007 [2]硬质合金国家重点实验室,湖南株洲412000 [3]中南大学,湖南长沙410083

出　　处：《硬质合金》2015年第1期1-8,共8页Cemented Carbides

基　　金：高档数控机床与基础制造装备专项课题(2012ZX04003-041;2013ZX04005-021)

摘　　要：MT-TiCN/α-Al2O3多层涂层是高性能硬质合金CVD涂层刀具的典型涂层结构,得到广泛的应用和研究。TiAlCNO过渡层可以改善MT-TiCN/α-Al2O3涂层之间的结合性能。通过改变沉积气氛氧化势,制备了不同成分的TiAlCNO过渡层和MT-TiCN/TiAlCNO/Al2O3多层涂层,研究了沉积气氛氧化势对TiAlCNO过渡层和MT-TiCN/TiAlCNO/Al2O3多层涂层的结构性能的影响。结果表明:当沉积气氛中有CO2时,沉积TiAlCNO过渡层中可以检测到α-Al2O3相;随沉积气氛中CO2的增加,TiAlCNO过渡层中的Al含量增加,沉积在TiAlCNO过渡层表面的α-Al2O3涂层织构降低,结合强度增加。当TiAlCNO过渡层沉积气氛中CO2流量由0 L/min增加到1 L/min时,Al2O3涂层的织构系数TC(113)由0.64增加到1.33,而TC(012)由2.07降到1.5,TC(110)由1.99降到0.97;划痕临界载荷LC由36.5 N增加到51.7 N。As the typical coating structure of high-performance CVD-coated carbide tools, MT-TiCN/Al2O3 multi-layer coating has been widely used and studied. TiAlCNO intermediate layer was expected to improve the interfacial properties between MT-TiCN and Al2O3 layers. By changing the oxidation potential of the deposition atmosphere, different TiAICNO coatings and MT-TiCN / TiAlCNO / Al2O3 multilayer coatings were prepared. The Influence of the oxidation potential of the deposition atmosphere on the structures and performances of TiAlCNO coatings and MT-TiCN/TiAlCNO/Al2O3 muhilayer coatings were studied. The mierostructure and properties of TiAlCNO layer and MT-TiCN/TiAlCNO/Al2O3 multi-layer coatings were characterized by SEM,TEM and XRD. The adhesive strength and mechanical properties of the MT-TiCN/TiAlCNO/Al2O3 multi-layer coated cemented carbide cutting tools were evaluated by indentation test and scratching test. The results show that the TiA1CNO layer deposited from deposition atmosphere with CO2, the alpha Al2O3 phase could be detected. The outer α-Al2O3 coating deposited on the TiAICNO layer shows lower growth orientation and higher adhesive strength. As CO2 flow increased from O L/min to 1.0L/min, the texture coefficient TC （113） increases from 0.64 to 1.33, TC （012） deceases from 2.07 to 1.5, TC（110） deceases from 1.99 to 0.97, and the scratch critical load LC increases from 36.5 N to 51.7 N.

关 键 词：CVD涂层 TiAlCNO AL2O3 涂层织构 结合强度 

分 类 号：TG174.4[金属学及工艺—金属表面处理]