不同冷等静压压力对ITO靶材性能影响的研究  

Study on the influence of different cold isostatic pressure on the performance of ITO target

作　　者：张明杰[1] 陈敬超[1] 彭平[1] 于杰[1] 

机构地区：[1]昆明理工大学,稀贵及有色金属先进材料教育部重点实验室,云南省新材料制备与加工重点实验室,昆明650093

出　　处：《化工新型材料》2015年第5期117-119,共3页New Chemical Materials

基　　金：新国家自然科学联合基金资助项目(u0837601);新国家基金资助项目(50874054);云南省创新团队(2009CI003);云南省自然科学基金资助项目(2008CD087)

摘　　要：采用模压和冷等静压结合的复合压制方式,即将前处理后的ITO粉体先经过超声波辅助模压成形,再经低温脱脂后将坯体冷等静压成形。设置了不同的成形压力,在超声波功率为1.5kW的超声波振动辅助下保压4min,得到ITO素坯。研究了不同冷等静压压力对ITO素坯的致密度和形貌的影响。结果表明,在冷等静压压力为250MPa时,得到了形状规则、致密度程度高、成分均匀的ITO素坯。Using the complex combination of molding and cold isostatic pressing, the pre-treatment ITO powder first was molding used ultrasound-assisted compression, and then was formed used cold isostatic pressing after defatting . In order to get ITO biscuit, setting a different molding pressure, at the ultrasonic power of 1. 5kW assisted packed for 4rain. The effects of different cold isostatic pressure on the density and morphology of ITO biscuit were studied. The re- sults showed that, when the cold isostatic pressure of 250MPa, it will obtain regular shape, a high degree of density, and uniform composition ITO biscuit.

关 键 词：模压 冷等静压 超声波 ITO素坯 

分 类 号：TQ174.758[化学工程—陶瓷工业]