基于微透镜阵列的半导体激光器堆栈匀化系统  

Homogenization System for Diode Laser Stack Beams Based on Microlens Array

作　　者：雷呈强[1] 汪岳峰[1] 殷智勇 尹韶云[3] 孙秀辉[3] 

机构地区：[1]军械工程学院电子与光学工程系,河北石家庄050003 [2]装备学院航天指挥系,北京101416 [3]中国科学院重庆绿色智能技术研究院集成光电技术研究中心,重庆400714

出　　处：《中国激光》2015年第5期50-57,共8页Chinese Journal of Lasers

基　　金：国家863计划

摘　　要：半导体激光器由于自身波导结构的不对称性导致光强分布不均匀而限制了其应用,为了对半导体激光光束进行整形以获得均匀光斑,设计了一种基于微透镜阵列的半导体激光器堆栈匀化系统。分析了微透镜阵列对半导体激光的匀化原理和光束匀化过程,通过分析微透镜边缘衍射对匀化光斑影响确定了微透镜孔径范围,采用近轴矩阵光学推导了目标光斑发散角。结合实例对微透镜阵列光束匀化系统进行了仿真和实验验证,实现了均匀性为91.89%的均匀光斑。The intensity distribution of diode laser is not uniform due to the broad-area and ridge-waveguide designs, the poor beam quality is the limiting factor of applications. In order to achieve homogenized spot by the beam shaping of high-power diode laser stack, a homogenization system for diode laser stack beams based on microlens array is designed. The diode laser beam shaping theory and process of microlens array are analyzed. The lower limit of clear aperture of microlens is confirmed by the analysis of the impact of the diffraction of microlens edge on the spot homogeneity. The intensity angle distribution of spot is defined by paraxial matrix optical analysis. The simulation and experimental test are carried out for the microlens array beam shaping system, realizing the spot with the homogeneity of 91.89%.

关 键 词：激光光学 半导体激光器堆栈 微透镜阵列 光束匀化 光斑均匀性 

分 类 号：TN248.4[电子电信—物理电子学]