椭圆偏振法测定在线Low-E玻璃的可见-近红外光学常数与膜厚  

Determination of Optical Constants and Thickness of Online Low-E Glass in Visible-near Infrared Region by Ellipsometry

作　　者：纪贝 黄水平[1] 周骏[1] 

机构地区：[1]宁波大学,理学院,浙江宁波315211

出　　处：《光子学报》2015年第5期189-193,共5页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61275153);浙江省教育厅科研计划(No.Y200803919);宁波市自然科学基金(No.2009A610043)资助

摘　　要：从在线Low-E玻璃光学机理出发,用椭圆偏振光谱仪对在线Low-E玻璃功能层和过渡层的可见-近红外波段的光学常数进行研究.测量了样品在三个不同入射角的椭偏参数,分别用Lorentz双振子模型和Cauchy模型来描述Low-E玻璃功能层和过渡层的光学色散特性.通过拟合椭偏参数获得在线Low-E玻璃的光学常数及每层膜厚度,并用扫描电镜对样品的膜厚进行表征.结果表明,Lorentz双振子模型和Cauchy模型能很好地解释在线Low-E玻璃的光学特性;同时,椭圆偏振法也为多层膜系统提供了一种测定光学常数和膜厚的可靠方法.Based on the optical mechanism of online Low-E glass, the optical constants of functional layer and transition layer of online Low-E glass in visible-near infrared region were analyzed by the spectroscopic ellipsometry. The ellipsometric data of the sample at three different angles of incidence were measured at first,then the Lorentz two-oscillator model and Cauchy model were used to characterize the dispersion characteristics of functional layer and transition layer of online Low-E glass , respectively. The optical constants and the thickness of each layer of online Low-E glass were obtained by fitting the measured ellipsometric data. Moreover, the Scanning Electron Microscope （SEM） were used to investigate the film thickness of the sample. The fitting results model can explain the optical properties of online provides a reliable method for the determination of suggest that Lorentz two-oscillator model and Cauchy Low-E glass well. Meanwhile, the ellipsometry also optical constants and thickness of the multilayer film systems.

关 键 词：在线low-E玻璃 光学常数 椭圆偏振法 Lorentz双振子模型 

分 类 号：TQ171[化学工程—玻璃工业] O734[化学工程—硅酸盐工业]