光栅刻划机进给导轨直线度误差对光栅衍射波前及杂散光的影响  

Influence of Feeding Guide′s Straightness Errors of Grating Ruling Machine on Diffraction Wave-Front of Grating and Intensity of Stray Light

作　　者：黄元申[1,2] 黄运柏[1,2] 杨海马[1,2] 李柏承[1,2] 苏仰庆 盛斌[1,2] 

机构地区：[1]教育部光学仪器与系统工程研究中心,上海200093 [2]上海市现代光学系统重点实验室,上海200093

出　　处：《光学学报》2015年第5期88-96,共9页Acta Optica Sinica

基　　金：国家自然科学基金(61378060;61205156;11105149);国家重大科学仪器设备开发专项(2012YQ170004);上海市教委曙光项目(11SG44);上海市教育委员会科研创新项目(14YZ095)

摘　　要：对光栅刻划机的进给导轨直线度误差做了系统的研究,推导了直线度误差对光栅衍射波面和杂散光的影响的计算公式,并且定义了干涉仪测量轴线到刻线始端这段距离为定位臂。得出以下结论:定位臂会放大进给导轨的直线度误差;光栅的衍射波前和杂散光强度主要受定位臂和导轨直线度大小的影响,若定位臂为50 mm,则水平方向直线度误差必须小于0.15″,若定位臂为10 mm,则水平方向直线度误差必须小于0.74″;与竖直方向的直线度相比,刻划机对进给导轨水平方向的直线度要求更高。理论推算与实验结果相符。A comprehensive analysis has been made for straightness errors of feeding guide of grating ruling machine, and some mathematical expressions have been deduced among the straightness errors, the diffraction wave-front and the intensity of stray light, and the distance from the measurement axis of interferometer to the beginning of lines has been defined as position arm. Some following conclusions have been made. Position arm can magnify the straightness errors of dividing guide. The diffraction wave-front and the intensity of straight light are mainly affected by the position arm and the straightness errors of feeding guide. If the position arm is 50 mm, the horizontal straightness errors must be less than 0.15″. However, if the position arm is 10 mm, the horizontal straightness errors must be less than 0.74″. Compared with the straightness in the vertical direction, the requirement of the grating-ruling machine for the horizontal straightness of dividing guide is higher. The value of theoretical calculation coincides with the experimental results.

关 键 词：光栅 直线度误差 定位臂 衍射波前 杂散光强度 

分 类 号：O436[机械工程—光学工程]