激光诱导前向传送中的热分析  

Numerical Study of Thermal Reaction in Laser Induced Forward Transfer

作　　者：邓宇[1] 郭钟宁[1] 黄志刚[1] 

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《机电工程技术》2015年第5期1-4,共4页Mechanical & Electrical Engineering Technology

基　　金：国家自然科学基金资助项目(编号:51175091)

摘　　要：针对激光诱导前向传送中牺牲层的热破坏,利用双温方程模型对激光与钛层的电子-晶格系统的作用过程进行分析,结合热传导方程模拟了钛层的纵向温度传递,获得了钛层的温度场。模拟发现激光脉冲能量,光斑直径决定了激光光斑的能量密度,纳米钛层的厚度决定了激光的透光率,三者共同影响钛层最终温度。当脉冲能量为7μJ,光斑直径为40μm,钛层厚度为80 nm时,数值计算的微孔尺寸为11.5μm,与实验的11.77μm基本吻合,说明该数值模型可靠,可用于预测激光诱导前向传送中钛层的破坏。Aiming at understanding the thermal impact in laser induced forward transfer （LIFT）, thermal reaction between Nano second pulse laser and Titanium in laser induced forward transfer is theoretically studied and modeled. The electron-lattice double temperature equations model is used to simulate the thermal reaction of Titanium. Together with the thermal conduction, the temperature distribution of titanium is calculated. It is found out that the laser influence is determined by the pulse energy and pulse width while the transparence of Titanium is determined by its thickness,then the temperature distribution is defined. With laser pulse energy of 7μJ ,laser spot size of 40 μm , and thickness of titanium of 80 nm, the diameter of micro hole in titanium is achieved as 11.5 μm which is similar to the experimental result 11.7μm . It is improved that the model is reliable and could be used to predict the thermal damage in LIFT.

关 键 词：激光诱导前向传送 热分析 双温方程 

分 类 号：TN249[电子电信—物理电子学]