浮动电极式三维柔性电容触觉传感阵列设计  

Design of Three-Dimensional Flexible Capacitive Tactile Sensing Array of Floating Electrodes

作　　者：余建平[1] 张玉良[1] 周兆忠[1,2] 

机构地区：[1]衢州学院机械工程学院,浙江衢州324000 [2]浙江工业大学机械工程学院,浙江杭州310014

出　　处：《仪表技术与传感器》2015年第5期11-13,41,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(51405263);衢州市科技计划项目(2014Y003)

摘　　要：提出了一种能够同时实现z-向压力与x-y向剪切力测量的新型三维柔性电容触觉传感阵列,采用浮动电极式的传感阵列结构设计,分别制作了基于FPCB的感应电极层和基于PDMS的浮动电极层,将脆弱的接口电路加工在底部的感应电极层上,大幅提高传感阵列的挠曲刚度。所设计的柔性电容触觉传感阵列在x-y和z-方向上的理论灵敏度分别为1.0%/m N和0.8%/m N。A three-dimensional flexible capacitive tactile sensing array which can measure the z direction pressure and x-y direction shear stress was proposed.Each capacitive sensing element consisted of a FPCB-based （ flexible printed circuit board） sensing electrodes layer and a PDMS-based （ poly dimethyl siloxane） floating electrode layer.The fragile interconnect for signal scanning were implemented on the FPCB,which effectively enhanced the device flexible rigidity.The estimated sensitivities of the unit sensor are 1.0%/mN and 0.8%/mN for the x-y axes and z-axes respectively.

关 键 词：压力传感器 电容传感器 三维 浮动电极 

分 类 号：TH823[机械工程—仪器科学与技术]