自支撑纳米多孔金薄膜制备研究  

Preparation of self-supported nanoporous gold film

作　　者：谭秀兰[1] 牛高[1] 罗江山[1] 曾勇[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2015年第6期229-232,共4页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(51306165)

摘　　要：采用磁控溅射镀金银膜,长时间热处理合金化制备前驱体合金,以渐进浓度的硝酸自由腐蚀去合金化成功制备出具有自支撑结构的纳米多孔金薄膜。采用扫描电镜和X射线能谱仪对去合金腐蚀前后样品的形貌和成分进行了分析,结果表明：400℃,36h的热处理使得薄膜样品完全合金化,获得了结晶致密的Au42Ag58合金膜;渐进浓度的自由腐蚀避免了薄膜的完全开裂,获得了样品尺寸大于15mm×15mm、厚度400~500nm、孔隙率约56%、具有自支撑结构的纳米多孔金薄膜,其微观结构为连续的三维多孔结构,系带尺寸40~140nm,80~100nm的系带达58%。The free-standing nanoporous gold film was synthesized by free corrosion dealloying in the increasing HNO3 solu- tion. Au-Ag precursors was preparated by alloying the Au and Ag film of the magnetron sputtered. Micro-structure and composi- tion of the sample before and after dealloying were characterized with scanning electron microscope and energy dispersive analysis of X-ray. The results indicated that the Au-Ag alloy precursors were obtained by 400 ℃ heat-treatment for 36 h. The increasing HNO3 solution prevented the surface to crack. The self-supported nanoporous gold with size up to 15minx 15 mm, thickness of 400-500 nm, ligament size of 40-40 nm, porosity of 56% were obtained.

关 键 词：纳米多孔金 去合金化 自支撑 

分 类 号：TG146.31[一般工业技术—材料科学与工程] O648[金属学及工艺—金属材料]