小型真空探测器动静态真空监测的实现  

Design of a Dynamic and Static Vacuum Test System for Small-sized Vacuum Detectors

作　　者：蔡易平[1] 胡孟春[1] 蔡兴瑞 

机构地区：[1]中国工程物理研究院核物理与化学研究所,四川绵阳621900 [2]西南交通大学,四川成都610000

出　　处：《真空电子技术》2015年第2期77-81,共5页Vacuum Electronics

基　　金：中国工程物理研究院专项课题(902-301)

摘　　要：为解决小型真空探测器体积小、内部空间有限、常规真空监测装置无法安装在探测器上进行直接测量的问题,设计一种外置动静态真空测试系统,并建立外置测试系统测量数据与小型真空探测器腔体内真空度的可靠关系。测试实例验证表明:本工作建立的外置动静态真空测试系统,按设计方式推算的探测器动静态真空度值与实际测量值的差异不到10%,可以较好地实现小型真空探测器的动态真空测试和静态真空监测。Small-sized vacuum detectors have limited internal space and so the conventional vacuum measuring device cannot be installed inside to realize direct vacuum monitoring. An external dynamic and static vacuum test system was designed, and the reliable corresponding relationship between external measuring data with the measuring internal vacuum was established. Test experiments showed that the difference between the dynamic and static vacuum value deduced from the data obtained from the designed external test system and the actual measuring vacuum value is less than 10%, indicating the test system can realize dynamic vacuum testing and static vacuum monitoring of the small vacuum detector.

关 键 词：小型真空探测器 外置动静态真空测试系统 动态真空 静态真空 

分 类 号：TB751[一般工业技术—真空技术]