热处理对Al/Al_2O_3/BaTiO_3薄膜电容器性能的影响  

The Influence of Heat-treatment on the Performance of Al/Al_2O_3/BaTiO_3 Thin Film Capacitor

作　　者：高标[1] 初蕾[1] 朱志斌[1] 孙峰[1] 张玉[1] 王玮[1] 

机构地区：[1]中国海洋大学材料科学与工程研究院,山东青岛266100

出　　处：《山东化工》2015年第11期1-3,共3页Shandong Chemical Industry

基　　金：国家自然科学基金(21471139);山东科技发展计划(2011GGX10201)

摘　　要：钛酸钡薄膜电容器以其能量密度高、性能可靠等优点而成为新能源领域的研究对象。本文以铝片作为电极材料,预煅烧过的钛酸钡为电介质材料。采用在空气中热处理的方法,使提拉过钛酸钡的铝电极表面生成一层热氧化膜,并且通过探讨一定的热处理制度,得到最佳的氧化铝层,提高介电性能。通过介电性能分析及等效电路模拟,得出铝表面生成了热氧化膜,升温速率10℃/min、保温时间120min是制备Al/Al2O3/BaTiO3电容器的最优条件,并且在0.5Hz下介电层介电常数达到3.84×104,介电损耗为0.2801,电容器的电容值达到2.92μF。Barium titanate thin film capacitors now become the important research object in the field of new energy for its high energy density and reliable performance. This paper,aluminium as electrode materials,barium titanate which were previous calcined as dielectric materials. The surface of aluminum electrode which was pulled barium titanate generated a layer of thermal oxidation film by method of heat- treatment in air. Then different heat- treatment system was discussed to obtain the best alumina layer which could enhance the dielectric properties. The dielectric properties analysis and equivalent circuit indicated that the surface of aluminum formed the alumina,heating rate of 10 ℃ / min and heat preservation time of 120 min were the optimal conditions to prepare aluminum / alumina / barium titanate capacitors. And the permittivity of composite material reached 3. 84 × 10^4,dielectric loss was 0. 2801,capacitance values reached 2. 92 μF under the 0. 5Hz frequency.

关 键 词：热处理制度 热氧化膜 介电性能 电容值 等效电路 

分 类 号：O484.42[理学—固体物理]