三维队列微电极在微细电火花加工的应用  

Application of 3D queue micro-electrode to micro-EDM

作　　者：徐斌[1,2] 王振龙[1] 伍晓宇[2] 雷建国[2] 阮双琛[3] 

机构地区：[1]哈尔滨工业大学机电工程学院微系统与微结构制造教育部重点实验室,黑龙江哈尔滨150001 [2]深圳大学机电与控制工程学院深圳市模具先进制造技术重点实验室,广东深圳518060 [3]深圳大学电子科学与技术学院深圳市激光工程重点实验室,广东深圳518060

出　　处：《光学精密工程》2015年第5期1304-1313,共10页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51405306;No.51175348;No.51205258);中国博士后科学基金资助项目(No.2014M552233);深圳市基础研究计划资助项目(No.JCYJ20140418095735629)

摘　　要：研究了三维微型腔模具的制备方法。该方法基于微型双工位分层实体制造工艺(DLOM),通过多层铜箔二维微结构叠加拟合出三维队列微电极,将制备的微电极用于微细电火花加工来制得三维微型腔模具。首先,利用线切割对100μm厚的多层铜箔进行逐层切割,获得多层二维微结构。然后,通过真空压力热扩散焊对多层铜箔二维微结构进行连接,叠加拟合出三维队列微电极。最后,在电压80V,脉冲频率0.2MHZ,脉冲宽度800ns,休止脉宽4 200ns的作用下,将上述工艺制备的三维队列微电极用于微细电火花加工,获得表面质量良好、形状与尺寸精度较高的三维微型腔模具。为了有效减少电极损耗对加工精度的不利影响,使用队列电极中的微电极依序对三维微型腔进行了加工。基于上述研究结果,制备了两种形状的三维队列微电极并通过微细电火花加工获得了表面粗糙度Ra为0.48μm的三维微型腔模具。与目前主流的微细电极逐层扫描放电加工三维微结构的工作方式相比,提出的三维微电极只需进行上下往返式加工便可获得三维微型腔模具,工作效率高且损耗低。This paper focuses on the fabrication of 3D micro-cavity molds.Based on micro Doublestaged Laminated Object Manufacturing（DLOM）process,3D micro-electrodes were fabricated by superimposing multilayer 2D micro-structures and they were applied to the micro Electrical DischargeMachining（EDM）to obtain a 3D micro-cavity mold.Firstly,100μm-thick Cu foils were cut by micro-EDM to obtain multilayer 2Dmicro-structures and then the 2Dmicro-structures were connected together to fit out 3D micro-electrodes through a vacuum pressure thermal diffusion welding.Under the conditions of a voltage of 80 V,apulse frequency of 0.2MHz,pulse width of 800 ns and a pulse interval 4 200 ns,the 3D micro-electrodes were applied to the micro-EDM and the 3D micro-cavity mold with high surface quality and a precise shape was obtained.In order to reduce the adverse impact of electrode wear on machining precision of the 3D micro-cavity mold,the 3Dqueue micro-electrodes were used to process the same 3D micro-cavity mold,by which the first electrode was for rough machining and the others for fine machining.On the basis of these studies,two kinds of 3Dqueue micro-electrodes were fabricated and the 3D micro-cavity molds with surface roughness of 0.48μm were obtained through the Micro-EDM.As compared with the current scanning 3D micro-EDM process,the 3D micro-cavity molds fabricated could be obtained through up and down reciprocating method of the 3Dqueue micro-electrodes,showing a sample machining process and higher efficiency.

关 键 词：三维微电极 三维微型腔 微细电火花加工 微型双工位分层实体制造 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]