线性渐变滤光片光谱分光特性及检测方法研究  

Study of Spectral Property and Measurement of Linear Variable Filters

作　　者：柳青[1,2] 周锦松[1] 聂云峰[1,2] 李杨[1] 张桂峰[1] 

机构地区：[1]中国科学院计算光学成像技术重点实验室,中国科学院光电研究院,北京100094 [2]中国科学院大学,北京100049

出　　处：《光谱学与光谱分析》2015年第4期1142-1145,共4页Spectroscopy and Spectral Analysis

基　　金：国家杰出青年科学基金项目(61225024)资助

摘　　要：线性渐变滤光片(LVF)被广泛应用于各种小型快速分光测试设备中。分光特性进行研究,给出了其分光特性的高斯函数表达式,分析了各个参数与线性渐变滤光片中心透过率、谱线宽度和线性渐变系数等特性的关系。将光谱成像仪标定的单色仪法引入线性渐变滤光片的分光特性检测中,讨论了检测系统的敏感性,并给出了相应的误差容限公式。分析表明单色仪出射狭缝相对光轴平移量,以及滤光片倾斜角度对检测精度影响最大,实际测量中可通过光路和系统机构的调整达到精度要求。构建检测系统完成了对成品线性渐变滤光片分光特性的检测,结果表明对中心透过率的测量均方根误差小于0.05%,验证了方法的精确性,普适性,检测结果可为线性渐变滤光片相关系统的设计和标定提供参数指导。Linear variable filters（LVF） are widely used in a variety of small rapid spectrometric detecting devices .In the present paper ,the splitting property of LVF was studied ,and the spectral‐property expression in Gaussian form was given ,and the rela‐tionship between indexes of expression and LVF center transmission ,width of spectrum ,and linear dispersion was specified . Measurement based on monochromator for imaging spectrometers calibration was introduced ,the sensitivity for detection system was discussed ,and the tolerance was analyzed .It was shown that the slit displacement of monochromator relative to the optical axle and the slope of LVF affect the detecting accuracy most ,and the tolerance can be reduced by adjustment of optical path and structure to reach requirement .System was built and the detection for spectral property of sample LVF was made .The result of data processing indicates that MSE for center transmission detection was lower than 0.05% ,and the accuracy of this method was proved .Reference‐parameters of relevant system designing and calibrating based on the LVF can be provided by this method .

关 键 词：线性渐变滤光片 光谱特性 检测方法 

分 类 号：O433.1[机械工程—光学工程]