四极质量分析器的几何量检测研究  

Research on geometrical feature measuring of quadrupole mass filter

作　　者：蒋家东[1] 袁道成[1] 岳晓斌[1] 王宝瑞[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900

出　　处：《制造技术与机床》2015年第2期35-38,共4页Manufacturing Technology & Machine Tool

基　　金：国家重大科学仪器设备开发专项资金资助(2011YQ130043)

摘　　要：四极质量分析器是四极质谱仪的核心部件之一,其极杆加工及组件装配精度要求很高。介绍了四极质量分析器研制中其部件极杆、陶瓷座的几何量检测内容及自研装置,四极质量分析器装配组件的装配精度检测方法。批量生产的四极质量分析器的检测结果表明装配的综合精度可以稳定达到3μm以内,几何量的检测满足实际要求,质谱测试的分辨率达到1 500以上,性能达进口四极质量分析器水平。The quadrupole mass filter is one of the most important parts in mass spectrometry （MS） used in the analysis area. The way of measuring geometrical feature of pole such as radius, straightness, cylindricity and surface imperfection is introduced, and the assembly errors of the quadrupole mass filter are measured with new devised equipment. The assembly accuracy of many quadrupole mass filters by our institute is less 3 μm, spectrum measurement of which show the mass resolution are higher than 1 500.

关 键 词：四极质量分析器 几何量检测 质量分辨率 

分 类 号：TH84[机械工程—仪器科学与技术]