Freestanding macroscopic metal-oxide nanotube films derived from carbon nanotube film templates  

作　　者：He Ma Yang Wei Jiangtao Wang Xiaoyang Lin WenyunWu Yang Wu Ling Zhang Peng Liu Jiaping Wang Qunqing Li Shoushan Fan Kaili Jiang 

机构地区：[1]State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics & Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China

出　　处：《Nano Research》2015年第6期2024-2032,共9页纳米研究（英文版）

基　　金：This work was supported by the National Basic Research Program of China （No. 2012CB932301）, the National Natural Science Foundation of China （Nos. 51472142, 51102147, and 51102144）, and the Chinese Postdoctoral Science Foundation （Nos. 2014M550701 and 2012M520261）.

摘　　要：Aligned carbon nanotube films coated with amorphous carbon were developed into novel templates by atomic layer deposition. Freestanding macroscopic metal-oxide nanotube films were then successfully synthesized by using these templates. The reactive amorphous carbon layer greatly improved the nuclei density, which ensured the high quality of the films and allowed for precise control of the wall thickness of the nanotubes. Using template-synthesized alumina nanotube films, we demonstrate a humidity sensor with a high response speed, a transmission electron microscopy （TEM） grid, and a catalyst support. The cross- stacked assembly, ultrathin thickness, chemical inertness, and high thermal stability of the alumina nanotube films contributed to the excellent performance of these devices. In addition, it is expected that the metal-oxide nanotube films would have significant potential owing to their material richness, macroscopic appearance, flexibility, compatibility with the semiconducting technologies, and the feasibility of mass production.与非结晶的碳涂的排列的碳 nanotube 电影被原子层免职开发进新奇模板。独立宏观的金属氧化物 nanotube 电影然后被使用这些模板成功地综合。反应的非结晶的碳层极大地改进了原子核密度，它保证了这些电影的高质量并且允许 nanotubes 的墙厚度的精确控制。用综合模板的氧化铝 nanotube 电影，我们以高反应速度，一个传播电子显微镜学(TEM ) 格子，和催化剂支持表明一个湿度传感器。跨 stacked 汇编， ultrathin 厚度，化学不活泼，和氧化铝 nanotube 电影的高热的稳定性贡献了这些设备的优秀性能。另外，金属氧化物 nanotube 电影将由于他们的材料丰富，宏观的外观，灵活性，与半导体的技术的相容性，和大量生产的可行性有重要潜力，这被期望。

关 键 词：metal-oxide nanotube film atomic layer deposition carbon nanotube humidity sensor catalyst support 

分 类 号：TB383[一般工业技术—材料科学与工程] TM862[电气工程—高电压与绝缘技术]