Al/TiN软硬交替多层膜的制备及摩擦磨损性能研究  

Preparation and Friction Wear Properties of Al/TiN Alternate Soft and Hard Multilayers

作　　者：范晓彦[1] 李镇江[2] 孟阿兰[3] 李春[4] 吴志国[5] 闫鹏勋[5] 

机构地区：[1]青岛科技大学数理学院,青岛市新型光电子材料与技术工程实验室,山东青岛266061 [2]青岛科技大学中德科技学院,山东青岛266061 [3]青岛科技大学化学与分子工程学院,山东青岛266061 [4]中国海洋大学物理系,山东青岛266100 [5]兰州大学物理科学与技术学院,甘肃兰州730000

出　　处：《润滑与密封》2015年第6期70-75,80,共7页Lubrication Engineering

基　　金：山东省自然科学基金项目(ZR2013EMQ006);青岛市应用基础研究计划项目(14-2-4-29-jch)

摘　　要：软硬交替的多层膜体系具有超硬、强韧、耐磨、自润滑的优势,能大大提高金属切削刀具在现代加工过程中的耐用度和适应性。设计Al/Ti N软硬交替纳米多层膜体系,并采用直流磁控溅射和阴极弧磁过滤等离子体沉积相结合的技术,室温下在单晶硅Si(100)衬底上制备一系列不同Ti N层厚度纳米多层膜,研究其结构、形貌、力学及摩擦磨损性能。结果表明:该涂层具有良好的多层结构,多层膜中Al呈非晶态或纳米晶态,Ti N结晶质量随其厚度增加得到提高;Al/Ti N多层膜硬度均高于混合法则计算的硬度值,出现了硬度增强效应;该多层膜体系虽具有较高的摩擦因数,但表现出较好的韧性。Alternate soft and hard muhilayer system with superhardness, high strength-toughness, high wear-resisting, self-lubrication, can greatly improve the durability and adaptability of the metal cutting tool in the modern processing.A1/ TiN nanoscale muhilayers were designed.A set of nanoscale muhilayers with different TiN layer thickness varied from 1. 1 to 8.4 nm were deposited on Si（100） substrates at room temperature using filtered cahodic arc plasma（FCAP） and DC magnetron technol0gies.The results indicate that the coatings have fine multilayered structure, A1 layers have an amorphous structure or a nanocrystalline structure in all muhilayer, and the crystallinequality of TiN layers is improved with the in- creasing of the TiN layer thickness.The hardness of the multilayers is higher than that calculated by rule-of-mixtures.Al- though the muhilayers possess higher friction coefficient, it has better toughness.

关 键 词：等离子体沉积 多层膜 摩擦性能 

分 类 号：TH117.1[机械工程—机械设计及理论]