双闭式气体静压导轨超精密工作台振动特性分析  

Vibration Analysis for Ultra-precision Stage with Double Closed Aerostatic Guideways

作　　者：蔡黎明[1] 钟君[1] 成贤锴[1] 刘斌[1] 于涌[1] 

机构地区：[1]中国科学院苏州生物医学工程技术研究所,江苏苏州215163

出　　处：《实验室研究与探索》2015年第5期42-44,共3页Research and Exploration In Laboratory

摘　　要：为获得超精密工作台系统特性,针对双闭式气体静压导轨超精密工作台的振动特性展开研究。建立了工作台系统的动力学模型,推导了系统振动微分方程。通过实验得出了在实际工况中较为准确的线性弹簧刚度,用线性弹簧模拟气体静压腔,简化了系统动力学模型。最终根据系统振动微分方程建立仿真模型并进行了求解和分析,得到了仿真系统的固有频率和振型,并通过振动实验验证了仿真模型的准确度。气体静压系统的隔振效果在于高频范围,其模态特性符合超精密工作台系统的结构要求。In order to study the vibration for ultra-precision stage with double closed aerostatic guide ways, a dynamic model of the system is established in this paper. Based on the results obtained on the stiffness-measured experiments, mechanical model of the air bearing system is simplified. With the system vibration differential equations achieved and solved, the natural frequency and modal shape of the model system are obtained. The correctness and accuracy of the simulation model are tested by experiments. The air bearing give better vibration isolation effect in high frequencies, the vibration characteristics of the system meet the requirements of ultra-precision stage. This paper provides the preliminary experimental data for the structure optimization and the dynamic transfer characteristic of the mode for the lithography tool in the future.

关 键 词：气浮工作台 振动 闭式 动力学 仿真 

分 类 号：TP138.9[自动化与计算机技术—控制理论与控制工程]