4.2K硅辐射热太赫兹探测器的响应度校准（英文）  

Responsivity Calibration of a 4.2K Silicon Terahertz Bolometer

作　　者：郑中信 余耀[1,2] 孙建东[1] 李欣幸[1] 秦华[1] 涂学凑[3] 陈健[3] 

机构地区：[1]中国科学院苏州纳米技术与纳米仿生研究所中国科学院纳米器件与应用重点实验室,江苏苏州215123 [2]中国科学院大学,北京100049 [3]南京大学电子科学与工程学院超导电子学研究所,南京210093

出　　处：《光子学报》2015年第6期76-82,共7页Acta Photonica Sinica

基　　金：The National Natural Science Foundation of China(Nos.61271157,11403084and 61401456);China Postdoctoral Science Foundation(No.2014M551678);Jiangsu Planned Projects for Postdoctoral Research Funds(No.1301054B)

摘　　要：提出一种基于标准黑体辐射源对宽谱太赫兹探测器进行响应度定标的方法.该方法包含一个直线型校准装置、两个定标流程和相应的模拟程序.考虑实验室温度、湿度和低通滤波器的透射特性,用该方法实现了4.2K硅辐射热太赫兹探测器的响应度定标.对黑体辐射的傅里叶变换光谱进行测试,验证了定标程序和定标结果.分析定位了定标装置的三种主要误差来源,并提出相应的改进措施.所提定标方法适用于热释电太赫兹探测器、微型辐射热太赫兹探测器等宽谱太赫兹探测器的响应度定标.A calibration method based on a standard blackbody source for broadband terahertz detectors was proposed. The method includes a line-of-sight calibration setup, two calibration procedures and the corresponding simulation programs. The method takes into account the ambient temperature, the ambient humidity and the transmittance of the terahertz low-pass filter. A 4.2 K silicon bolometer was calibrated in the terahertz range by using the proposed method. The calibrated detector was further verified by using a Fourier-transform spectrometer to measure the blackbody emission spectrum. Three main sources of calibration error were identified and the corresponding solutions to reduce the error were proposed. The method can be applied for terahertz pyroelectric detectors, terahertz microbolometers and other types of broadband terahertz detectors in general.

关 键 词：太赫兹 探测器 响应度 黑体 滤波器 水汽吸收 

分 类 号：O43[机械工程—光学工程]