用中红外光谱法分析含微水绝缘油的粘度  

Laser Absorption Spectroscopy for Detection of Hydrogen Fluoride Using Tunable Diode Laser

作　　者：高彦伟[1] 张玉钧[1] 陈东[2] 何莹[1] 尤坤[1] 徐金凤[1] 刘文清[1] 

机构地区：[1]中国科学院安徽光学精密机械研究所环境光学与技术重点实验室,合肥230031 [2]合肥工业大学仪器科学与光电工程学院,合肥230009

出　　处：《光子学报》2015年第6期119-124,共6页Acta Photonica Sinica

基　　金：The National Key Scientific Instrument and Equipment Development Projects （ No. 2012YQ22011902 ）, the National Science ＆ Technology Pillar Program during the Twelfth Five-year Plan Period（No. 2013BAK06B08）, the National High Technology Research and Development Program of China （No. 2014AA06A503）, and the Natural Science Foundation of Anhui Province （No. 1308085MF93）

摘　　要：研究分布式反馈激光器的温度电流调谐特性及氟化氢气体在近红外波段的吸收线分布特征．利用归一化洛伦兹函数实现Voigt线型快速近似计算，并分析气体吸光度曲线的Voigt线型拟合以及波长扫描气体浓度反演算法．选择1．28μm附近氟化氢气体单根吸收线作为目标吸收线设计可调谐二极管激光吸收光谱系统，对已知标准浓度氟化氢气体配置的不同浓度气体进行测量．系统的检测限达到1.12ppm-m，且具有较高的测量准确度和长期稳定性，满足氟化氢气体实时在线监测的需要．Temperature and current tuning characteristics of distributed feedback laser and absorption lines distribution of HF gas in near infrared was investigated, generalized Lorentz functions was used to realize rapid approximate calculation of Voigt function. The Voigt profile fitting of absorbance and the inversion of gas concentration for wavelength scanning technology. A tunable diode laser absorption spectroscopy system for HF gas concentration measurement was designed, using one absorption line of HF gas near 1. 28 μm as the target absorption line, using known standard concentration HF gas for preparation of different concentration HF gas to measurement. The detection limit is 1.12 ppm-m. The system has high measurement accuracy and long-term operate stability, satisfies the needs of HF gas real- time online monitoring.

关 键 词：氟化氢 TDLAS Voigt线型 DFB激光器 气体测量 在线监测 吸收 

分 类 号：O433.5[机械工程—光学工程]