碳纳米管介电电泳组装及过程控制研究进展  

Recent Progress on Dielectrophoretic Assembly and Process Control of Carbon Nanotubes

作　　者：韩子旭 安立宝[1] 

机构地区：[1]河北联合大学机械工程学院河北省无机非金属材料重点实验室,河北唐山063009

出　　处：《微电子学》2015年第3期382-386,390,共6页Microelectronics

基　　金：国家自然科学基金资助项目(51172062;51472074);河北省自然科学基金资助项目(E2012209017);河北省"百人计划"资助项目(E2012100005)

摘　　要：碳纳米管具有独特的结构和卓越的电学、热学、力学等性能,有望在微纳电子、微纳机电系统、传感器、新能源、光学等诸多领域获得具有深远影响的应用。碳纳米管的组装是其获得广泛应用的重要前提,基于介电电泳的组装和过程控制技术近年来得到了迅速发展。这些技术包括回路中串联自限制性电阻,间隙电信号实时监测和反馈控制,三维结构的组装和包覆,引入不同形状浮动电极等。对碳纳米管介电电泳组装及各种新技术做了系统介绍,并对各种方法的优缺点进行了对比与总结,为探索稳定、高效的碳纳米管自动组装方法提供帮助。Carbon nanotubes （CNT） have been expected to find wide and significant applications in micro- and nano-electronics, micro- and nano-electromechanical-systems, sensors, new energy, optics and many other fields due to their unique structures and excellent electrical, thermal, and mechanical properties. A prerequisite for many of these applications is the need to assemble CNTs across a pair of electrical conductors. Techniques for CNT assembly based on dielectrophoresis （DEP） and process control have been improved rapidly in recent years, which include connecting a limiting resistor in series in the control circuit, monitoring gap electrical signals in real-time and performing feedback control, three dimensional assembly and encapsulation, and applying floating electrodes with different shapes. The concept of DEP assembly of CNTs and its influencing factors, in particular the above- mentioned new techniques were reviewed. These techniques were summarized by comparing their benefits. It was our intention to help exploring a stable and efficient CNT assembly method by DEP with high degree of process automation.

关 键 词：碳纳米管 介电电泳组装 过程控制 参数 自动化 进展 

分 类 号：TN304.18[电子电信—物理电子学]