基于像散曲面微透镜的半导体激光准直研究  

Research of laser diode beam collimation based on astigmatism surface microlens

作　　者：殷智勇[1,2] 强希文[1] 汪岳峰[3] 江钰[1] 徐云岫 宗飞[1] 封双连[1] 胡月宏[1] 

机构地区：[1]西北核技术研究所,西安710024 [2]中国人民解放军装备指挥技术学院航天指挥系,北京101416 [3]军械工程学院光学与电子工程系,石家庄050003

出　　处：《激光技术》2015年第4期458-461,共4页Laser Technology

摘　　要：为了实现半导体激光器的光束准直,分析了半导体激光器光束沿快、慢轴方向的准直原理。采用单个半导体激光器作为被准直单元,提出了基于像散曲面微透镜的半导体激光器光束准直方法。讨论了半导体激光器填充因子对像散曲面微透镜准直性能的影响。对填充因子0.5的半导体激光器进行模拟验证。准直后,快轴方向剩余发散角约为0.34°,慢轴方向剩余发散角约为2.69°。结果表明,像散曲面微透镜不但可以对高填充因子的半导体激光器光束进行准直,而且准直后出射光斑面积小。该研究为高功率半导体激光器堆栈光束的准直提供了可行性方案。In order to calimate laser beam of laser diodes,the principle of beam collimation was analyzed in the fast and slow axis directions. Based on astigmatic surface microlens,one method was proposed to collimate the laser beam by regarding one laser diode as the collimated unit. The effect of filling factor of laser diode on collimation performance was discussed. As an example of laser diode of 0. 5 fill factor,the remaining divergence angle of the fast axis reaches about0. 34° and the remaining divergence angle of the slow axis reaches about 2. 69°. The results indicate that the microlens can collimate the laser diodes beam with high fill factor and the spot area of the collimated light is very small. The research can provide the new feasible collimation method for high power laser diodes.

关 键 词：激光器 光束准直 微透镜 像散 剩余发散角 填充因子 

分 类 号：TN248.4[电子电信—物理电子学]