钛合金基底NiCr薄膜测力传感器的设计制作与检测  

NiC r thin film pressure sensor for measuring force of Titanium base

作　　者：安春华[1] 武文革[1] 成云平[1] 杜晓军[1] 

机构地区：[1]中北大学,山西太原030051

出　　处：《制造技术与机床》2015年第6期67-69,共3页Manufacturing Technology & Machine Tool

基　　金：山西省回国留学人员科研资助项目(2013-086)

摘　　要：为了获得性能优良的切削力测量传感器,设计了两种结构的切削力测量用镍铬合金薄膜传感器。采用相同工艺分别制作了Ti6Al4V和45钢材料的基片,并对比分析了基片的表面质量。优选出钛合金作为基底,在其上制备了所设计的两种结构的薄膜传感器样品,测量了传感器敏感栅尺寸、薄膜电阻率、电阻栅薄膜厚度、传感器电阻值,分析了传感器电阻值的影响因素。In order to obtain good performance sensors for measuring cutting forces,two kinds of nickel-chromium thin film alloy sensors is designed. Ti6 Al4 V and 45 steel substrates are produced using the same technology and the surface quality are analyzed comparatively. Preferably choose the titanium alloy as the substrate,on which the two kinds of thin-film sensor sample are prepared and the size of the sensor sensitive gate are measured,the film resistivity,the thickness of the thin film resistor grid,and the resistance value of the sensor are measured,analyze the causes affecting the sensor resistance value.

关 键 词：设计 制作 基底 电阻栅结构 测量 

分 类 号：TH7[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]