633nm稳频激光器波长校准装置建立与应用  

Establishing and Applications of Wavelength Calibrating Equipment of 633 nm Frequency Stabilized Laser

作　　者：马建敏[1] 余培英[1] 赵玉茹[1] 武鹏[1] 

机构地区：[1]上海市计量测试技术研究院,上海201203

出　　处：《激光与光电子学进展》2015年第7期102-107,共6页Laser & Optoelectronics Progress

摘　　要：建立了633 nm波长标准装置,已为各行各业的激光干涉仪、激光跟踪仪等测量设备提供精准的长度校准服务。采用稳频激光器波长校准的拍频原理,将测量值溯源到长度波长基准。该激光器波长校准装置包括:参考激光器、被检激光器、合束镜、光电探测器、带宽放大器、频谱分析仪、频率计以及微机数据采集系统。分析了提高检测精度的影响因素。给出了拍频实验输出结果时间频率采样图。解析了波长、频率、稳频特性等检定项目的判定依据。Established wavelength calibrating equipment has been used for precise length calibrating service of measurement devices of laser interferometers and laser trackers for many users. In term of beat frequency for laser wavelength calibrating its measurement value can be traced to the source as length wavelength standard. The wavelength calibrating equipment consists of reference laser, detected laser, optical elements of combined beam, photoelectric detector, wide band amplifier, spectrum analyzer, frequency counter and computer data acquisition system. Influence factors of improving the accuracy of detection are analyzed. Time sampling diagrams of results of beat frequency experiment are given. The basis of judging of relationship between wavelength, frequency and characteristic of frequency stability is also analyzed.

关 键 词：测量 校准装置 拍频 频率稳定度 阿伦方差 

分 类 号：O436[机械工程—光学工程]