光学制造中频残差对光学调制传递函数的影响  

Impact of Mid-spatial Frequency Errors in Optical manufacturing on Modulation Transfer Function

作　　者：曾雪锋[1] 张学军[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,中国科学院光学系统先进制造技术重点实验室,吉林长春130033

出　　处：《激光与光电子学进展》2015年第7期226-231,共6页Laser & Optoelectronics Progress

基　　金：国家973计划(2011CB013205)

摘　　要：为了研究光学表面制造残差对成像系统性能的影响,提出了基于光学系统出瞳位相差的空间频段误差划分方法,推导出了统计意义下的中频(MSF)误差对调制传递函数(MTF)的影响函数解析式,确定了MTF受中频误差影响的特征分辨率.对比低频(LSF)误差与MSF误差影响的区别,MSF误差导致系统调制传递函数从低分辨率处开始迅速下降,并根据中频影响函数解析式得到MSF误差导致MTF曲率突变特征分辨率.In order to study the influence of optical surface residual on the optical image system, a kind of method dividing spatial frequency based on the exit pupil phase of the optical system is proposed and the analytical expression of modulate transfer function which is influenced by mid-spatial frequency （MSF） errors is provided. The feature spatial resolution of the image whose modulate transfer function （MTF） is influenced by MSF is obtained. By comparing the influence of low-spatial frequency （LSF） errors and MSF errors, it is concluded that there is a sudden drop of MTF on the point of feature frequency under the influence of MSF.

关 键 词：光学制造 中频误差 成像模型 调制传递函数 特征频率 

分 类 号：O439[机械工程—光学工程]