溶胶-凝胶法制备Bi_4Si_3O_(12)薄膜的工艺参数影响研究  

Effect of Process Parameters on Bi_4Si_3O_(12) Thin Films Prepared by Sol-Gel Method

作　　者：郭正青 谢建军[1] 朱晓邢[1] 施鹰[1] 雷芳[1] 

机构地区：[1]上海大学材料科学与工程学院,上海200444

出　　处：《人工晶体学报》2015年第6期1575-1581,共7页Journal of Synthetic Crystals

基　　金：上海市科研计划能力建设项目(14520500300);国家自然科学基金面上项目(51172139)

摘　　要：采用溶胶-凝胶法结合旋涂工艺,在石英玻璃衬底上制备了Bi4Si3O12(BSO)多晶薄膜。通过X射线衍射(XRD)、傅里叶变换红外光谱(FT-IR)、扫描电子显微镜(SEM)、原子力显微镜(AFM)、荧光光谱仪和紫外-可见(UV-Vis)分光光度计表征了薄膜的物相结构、微观形貌及其光学性质,系统研究了制备过程中的溶胶组成和热处理工艺参数对薄膜性能的影响。结果表明,前驱体溶胶经750℃热处理6 h可得到单相的BSO薄膜;预热处理可显著改善薄膜的形貌,降低冷却速率可明显减少薄膜裂纹,增强薄膜发光强度;在溶胶中加入乙二醇乙醚可显著提高薄膜的表面平整度;薄膜的透过率随着裂纹数量的减少明显提高。Bi4Si3O12（ BSO） polycrystalline thin films were prepared on quartz glass substrates by sol-gel route combined with the spin-coating method. The crystal structure,morphology and optical property of the BSO films were analyzed by X-ray diffraction（ XRD）,fourier transform infrared spectroscopy（ FTIR）, scanning electron microscope（ SEM）, atom force microscope（ AFM）, fluorescence spectrophotometer and ultraviolet-visible（ UV-Vis） spectrophotometer. The influence of preparation conditions on morphologies and optical properties of Bi4Si3O12（ BSO） thin films was investigated. The results suggest that a single-phased BSO film was obtained when the thin film precursor was annealed in a muffle furnace at 750 °C for 6 h. Pre-sintering process and reduction of cooling rate are beneficial to the improvement of microstructure and luminous intensity of BSO thin films. Addition of 2-ethoxyethanol in sols enhances the smoothness of BSO thin films by changing the reaction mechanism. The transmittance of thin films decreases with the increasing of cracks.

关 键 词：Bi4Si3O12薄膜 溶胶-凝胶法 形貌 

分 类 号：O484[理学—固体物理]