高分辨扫描透射电子显微镜原理及其应用  

The principle and applications of high-resolution scanning electron microscopy

作　　者：贾志宏[1] 丁立鹏[1] 陈厚文[1] 

机构地区：[1]重庆大学材料科学与工程学院,重庆400044

出　　处：《物理》2015年第7期446-452,共7页Physics

基　　金：国家自然科学基金(批准号:51271209)资助项目

摘　　要：扫描透射电子显微术是目前应用最广泛的电子显微表征手段之一,具有分辨率高、对化学成分敏感和图像直观易解释等特点。其中高分辨扫描电子显微镜可以直接获得原子分辨率的Z衬度像,结合X射线能谱(EDS)和电子能量损失谱(EELS),可在亚埃尺度上对材料的原子和电子结构进行分析。文章简述了扫描透射电子显微镜的基本原理及其应用现状,重点论述了高角环形暗场(HAADF)和环形明场(ABF)像的成像原理、特征和应用。此外,文中还对原子尺度分辨率的X射线能谱及电子能量损失谱元素分析方法进行了简述。Scanning transmission electron microscopy（STEM） is currently one of the most widely used methods for microscopic imaging, due to its advantages of improved resolution, high compositional sensitivity, and directly interpretable images. High-resolution STEM can directly obtain atomic resolution Z-contrast images, and also analyze the atomic and electronic structure of materials on a sub- angstrom scale in combination with X- ray energy- dispersive spectrometry（EDS）and electron energy loss spectrometry（EELS）. The fundamental concept and applications of STEM are briefly introduced, and the principle, characteristics and applications of high angle annular dark field and annular bright field imaging are described. The characteristics and applications of EDS and EELS are also briefly described.

关 键 词：扫描透射电子显微镜 高角环形暗场像 X射线能谱 电子能量损失谱 

分 类 号：TN16[电子电信—物理电子学]