基于飞秒激光切割的石墨烯图案化研究  

Patterning of Graphene by Femtosecond Laser Cutting

作　　者：林喆[1] 叶晓慧[1] 韩金鹏[1] 范培迅[1] 钟敏霖[1] 

机构地区：[1]清华大学材料学院激光材料加工研究中心,北京100084

出　　处：《中国激光》2015年第7期85-89,共5页Chinese Journal of Lasers

基　　金：国家973计划(2011CB01300)

摘　　要：随着石墨烯研究的不断开展,图案化的石墨烯成为石墨烯器件应用的重点需求。采用飞秒激光切割的方法对石墨烯进行图案化。研究了飞秒激光能量密度和扫描速度对石墨烯切割的影响,通过光学显微镜和拉曼光谱仪,分析了不同激光参数下石墨烯的切割质量。得到了飞秒激光切割单层和多层石墨烯的能量密度阈值,分别为1.0 J/cm2和0.8 J/cm2,最优的激光扫描速度为100 mm/s。通过切割区域残余石墨烯的拉曼光谱分析得到本方法切割石墨烯的机理为氧化烧蚀。基于优化的激光参数,通过对激光光束移动的控制,实现了不同复杂图案石墨烯的切割。本方法为石墨烯器件在未来的广泛应用提供了技术支持。With the continuous study of graphene, patterned graphene becomes the important requirement of graphene device application. The graphene patterned by femtosecond laser cutting is researched. The laser energy density and scanning speed influence the quality of graphene pattern, which is characterized by optical microscope and Raman spectrometer. The threshold of laser energy density for monolayer graphene and multilayer graphene are determined to be 1.0 J/cm^2 and 0.8 J/cm^2, respectively, while the optimal scanning speed is 100 mm/s. By analyzing the Raman spertra of residual graphene in the laser scanning area, the mechanism of laser cutting is considered to be oxidized ablation. Basing on the optimal laser parameters, the complex patterning of graphene is achieved by controlling the laser beam movement. The method mentioned in this study provides a powerful support for graphene devices.

关 键 词：激光技术 石墨烯 超快激光切割 图案化 

分 类 号：O436[机械工程—光学工程]