低功耗聚合物MZI结构热光开关研究  

Polymeric MZI Thermo-Optic Switch with Low Power Consumption

作　　者：孙静雯[1] 孙健[1] 王艳双[1] 曲禄成 王希斌[1] 王菲[1] 张大明[1] 

机构地区：[1]吉林大学电子科学与工程学院,集成光电子学国家重点联合实验室吉林大学实验区,吉林省光通信用聚合物波导器件工程实验室,吉林长春130012

出　　处：《中国激光》2015年第7期151-155,共5页Chinese Journal of Lasers

基　　金：国家自然科学基金(61405070,61475061,61177027,61261130586);吉林省科技发展计划项目(20140519006JH);吉林省发改委高技术产业专项资金项目(JF2012G048)

摘　　要：设计并制作了一种基于马赫-曾德尔干涉仪(MZI)结构的低功耗聚合物热光开关。聚合物材料具有低热导率和高热光系数的优点,可以有效降低热光器件的功耗。在Si O2衬底上,采用热光系数较大的Norland紫外固化胶(NOA73)作为波导芯层,聚甲基丙烯酸甲酯和甲基丙烯酸环氧丙酯的共聚物[P(MMA-GMA)]作为波导的上包层,设计了热光开关器件,并对光场和热场进行了模拟,采用传统的半导体工艺完成了热光开关器件的制备。器件的测试结果表明,在1550 nm工作波长下,热光开关器件的消光比为20.2 d B,驱动功率仅为9.14 m W,开关的上升时间为174μs,下降时间为292μs。A polymeric Mach- Zehnder interferometer（MZI） thermo- optic（TO） switch with low power consumption is designed and fabricated. The polymer materials have the advantages of low thermal conductivity and high thermo-optic coefficient. Therefore it can reduce the power consumption of the thermooptic device effectively. The TO switch is designed on the Si O2 substrate with selecting the Norland optical adhesive（NOA73） as the core layer and using Poly（methyl methacrylate- glycidyl methacrylate） [P（MMAGMA）] as the upper cladding. The light field and thermal field distribution of the TO switch are both simulated.The TO switch is fabricated by using the traditional semiconductor technology. At 1550 nm wavelength, the extinction ratio of the device is 20.2 d B and the power consumption is only about 9.14 mW. The rise time and the fall time of the switch are 174 ms and 292 ms, respectively.

关 键 词：光学器件 热光开关 集成光学材料 聚合物波导 马赫-曾德尔干涉仪 

分 类 号：TN256[电子电信—物理电子学]