调制比对Ti/TiB_2多层膜结构和力学性能的影响  

Synthesis and Characterization of Bionic Ti/TiB_2 Multilayer

作　　者：周广宏[1] 方冬[2] 印凤 夏木建[1] 庄国志[1] 丁红燕[1] 

机构地区：[1]淮阴工学院江苏省介入医疗器械研究重点实验室,淮安223003 [2]山东省立医院,济南250021

出　　处：《真空科学与技术学报》2015年第7期819-824,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(51175212);江苏省介入医疗器械研究重点实验室开放基金项目(JR1503)

摘　　要：根据贝壳珍珠层的结构特点,以金属Ti层为软质层,对Ti B2陶瓷薄膜进行仿生增韧处理。采用磁控溅射法制备了不同调制比(Λ,tTi B2:tTi)的Ti/Ti B2周期性多层膜,并着重研究了调制比对多层膜的纳米硬度、弹性模量、膜基结合力以及断裂韧性的影响。研究结果表明:通过磁控溅射法制备的Ti/Ti B2多层膜具有清晰的纳米层状结构,表面致密平整,与基体有着良好的物理结合。多层膜的硬度和弹性模量随着调制比的增加而增大,而多层膜与基体的结合力呈现出先增大然后下降的趋势,当调制比Λ=3时,膜基结合力最高可以达到12.6 N;多层膜的断裂韧性随着调制比的增加呈现出先增大而后减小的趋势,当调制比Λ=5时多层膜的断裂韧性最好,其断裂韧度为2.26 MPa·m1/2,比Ti B2单层膜提高了60%以上。这是因为多层膜中的Ti子层可使裂纹尖端产生钝化作用,从而引起裂纹扩展路径发生偏转,提高了多层膜的断裂韧性。A novel type of the bionic Ti/TiB2muhi-layers with improved fracture toughness were synthesized by magnetron sputtering on Si substrate. The impact of the Ti-transition layer and modulation ratio on the microstructures and me- chanical properties of the Ti/TiB2 multi-layers were characterized with X-ray diffraction, scanning electron microscopy and conventional mechanical probes. The results show that the Ti-transition layer and modulation ratio strongly affect the me- chanical behavior of the smooth compact nano-layered Ti/TiB2 coating. For example, as the modulation ratio increased, the nano-hardness and elastic modulus increased; the fracture toughness and adhesion at the multilayer/substrate interface changed in an increase-decrease mode. Grown with a ratio of 3, the multilayer has the strongest interfacial adhesion of 12.6 N;and with a ratio of 5,the highest fracture toughness increased up to 2.26 MPa·m1/2,60% higher than that of the TiB2 coating,mainly because the Ti-layer effectively passivates the formation and propagation of cracks of the TiB2 layer.

关 键 词：Ti/TiB2多层膜 调制比 力学性能 仿生 

分 类 号：TG113.25[金属学及工艺—物理冶金] TG174.444[金属学及工艺—金属学]