Cr-Ti-N系多层膜成分及周期对抗冲蚀性能的影响  

Influence of Cr-Ti-N Multilayers with Different Periods and Constituents on Erosion Resistance Performance

作　　者：金杰[1] 黄晓林[1] 孟祥宇[1] 陈蕴博[2] 高克玮[3] 

机构地区：[1]北京机械工业自动化研究所电器物理设备与应用工程技术中心,北京100120 [2]机械科学研究总院先进制造技术研究中心先进成形技术与装备国家重点实验室,北京100083 [3]北京科技大学材料科学与工程学院,北京100083

出　　处：《中国表面工程》2015年第4期105-112,共8页China Surface Engineering

基　　金：北京机械工业自动化研究所所基金(10211169032)

摘　　要：苛刻环境下发动机组件存在严重的固体颗粒(SPE)冲蚀,导致其可靠性降低。为研究多层膜成分及调制周期对膜层冲蚀性能的影响,利用金属蒸发真空弧离子源(MEVVA)和磁过滤阴极真空弧复合离子束沉积技术在AM355基材表面制备交替周期分别为5、13和26的3组CrNx/TimCr1-mN、TiNy/TimCr1-mN多层膜。采用微粒喷浆冲蚀试验机、场发射扫描电子显微镜(FESEM)、X射线衍射仪(XRD)等对膜层冲蚀性能、形貌及物相结构进行测试表征。结果表明:采用该技术制备的CrNx/TimCr1-mN、TiNy/TimCr1-mN多层膜结构致密、交替层变化明显。随着交替周期的增加,两体系多层膜的晶面间距减小,抗冲蚀性能得到提高,分别提高了8倍和20倍以上。Under harsh environments, the components in aircraft operating often endure decreasing reliability caused by solid particle erosion （SPE） degradation. In order to study the influences of different periodic multilayers on erosion per- formance, the 5, 13 and 26 periodic multilayers of CrNx/TimCr1-mN、TiNy/TimCr1-mN were prepared on AM355 sub-strates. Erosion resistance, surface characteristics and phase structure of different periodic multilayers were studied by employing solid particle impact machine （slurry jet）, field emission scanning electron microscope （FESEM） and X-ray diffraction. The results show that the films are compacted with distinctly alternated layers. With the increase of the peri- od, the crystal plane spacing becomes smaller, and the films exhibit great erosion resistance with 8 and 20 times improve-ment, respectively.

关 键 词：磁过滤阴极真空弧 多层膜 交替周期 冲蚀性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理]