超短脉冲激光微焊接玻璃进展  

Recent Progress in Ultrashort Pulsed Laser Microwelding of Glasses

作　　者：范文中[1] 赵全忠[1] 

机构地区：[1]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800

出　　处：《激光与光电子学进展》2015年第8期1-13,共13页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(61178024)

摘　　要：近年来,随着元器件不断小型化及人们对产品高密度、高可靠性要求的提高,有效的微连接已成为微加工的重要环节之一。虽然目前已有多种方法可以实现同种材料或异种材料间的微连接,但对于玻璃等透明易碎材料,实现有效的微连接一直是一个挑战。目前激光已被广泛应用于焊接各种材料,但普通长脉冲激光的能量不易被玻璃吸收而且热膨胀易使玻璃碎裂,并不适合微焊接玻璃等透明材料。超短脉冲激光与透明材料相互作用具有热效应小及非线性吸收的特点,非常适合透明材料的微焊接,目前已经成为微加工领域的研究热点。介绍了超短脉冲激光微焊接玻璃的机理、存在的问题以及潜在应用,并对其未来发展进行了展望。In recent years, with the continuous miniaturization of components and the requirements for more compact and highly reliable products, effective microjoining has become one of the important parts of micromanufacturing. Several methods have been successfully used to microjoin similar or dissimilar materials. However, for transparent and fragile materials, such as glasses, the effective microjoining has been a challenge. Nowadays, a few kinds of lasers have been widely used for welding many materials, but for lasers with long pulse width, the energy can hardly be absorbed and the thermal expansion may make the glasses broken, which is not suitable for glasses microjoining. Due to the excellent characteristics of little thermal effect of heating materials and nonlinear absorption, ultrashort pulsed lasers are very suitable for microjoining glasses, which has become a hot research field of micromanufacturing. The mechanism of ultrashort pulsed laser microwelding of glasses, the existing problems and the potential applications are elaborated. The future trends of ultrashort pulsed laser microwelding of glasses are also prospected.

关 键 词：材料 超短脉冲激光 微连接 微焊接 玻璃 飞秒激光 皮秒激光 

分 类 号：TN249[电子电信—物理电子学]