Ta/[NdFeB/Nd]_n/Ta(n=1,5,8,10)多层膜磁性能研究  

Magnetic Properties of Ta/[Nd Fe B/Nd]_n/Ta(n=1, 5, 8, 10) Multilayer Films

作　　者：张敏刚[1] 李敏杰[1] 刘丽[1] 刘文峰[1] 陈峰华[1] 

机构地区：[1]太原科技大学,山西太原030024

出　　处：《稀有金属材料与工程》2015年第7期1805-1808,共4页Rare Metal Materials and Engineering

基　　金：教育部高校博士点基金(20101415110003);山西省自然科学基金(2008011042-2);山西省研究生优秀创新项目(20113116)

摘　　要：采用磁控溅射法制备了Ta/[Nd Fe B/Nd]n/Ta(n=1,5,8,10)多层膜。采用X射线衍射仪、振动样品磁强计及原子力显微镜对薄膜样品的晶体结构、磁学性能及表面形貌进行了测试分析;并对薄膜的温度稳定性进行了测试。结果表明,在Nd Fe B与Nd的总厚度保持不变的情况下,随Nd Fe B/Nd层数的增加薄膜的矫顽力先增大后减小,其中n=8时样品磁性能最好。最佳磁性能为H ci=1995 k A/m,(BH)max=111.3 k J/m3。Ta/[Nd Fe B/Nd]n/Ta（n=1, 5, 8, 10） multilayer films were prepared by a magnetron sputtering method.The crystal structure, magnetic properties and surface morphology of samples with different thin films were studied through X-ray diffraction, vibration sample magnetometer and AFM, respectively.And the temperature stability of thin films was tested.Results show that the coercivity of Ta/[NdFeB/Nd]n/Ta films increases first and then decreases with increasing the number of layers for the same thickness of Nd Fe B and Nd, while the magnetic properties of n = 8 are the best.The coercivity Hci = 1995 kA/m and（BH）max = 111.3 k J/m^3 are achieved in the film of n=8.

关 键 词：永磁薄膜 相结构 矫顽力 磁能积 

分 类 号：TM273[一般工业技术—材料科学与工程]