电容薄膜真空计测量结果与温度关系的实验研究  

RESEARCH OF THE RELATIONGSHIP BETWEEN TEMPERRATURE AND CDG MEASUREMENT RESULTS

作　　者：王迪[1] 冯焱[1] 孙雯君[1] 赵澜[1] 

机构地区：[1]兰州空间技术物理研究所国防科技工业真空一级计量站,兰州730000

出　　处：《真空与低温》2015年第4期213-215,共3页Vacuum and Cryogenics

摘　　要：利用直接比较法装置,对满量程为133Pa 的电容薄膜真空计进行实验.系统研究了在15. 0 ℃■26. 1 ℃范围内的测量结果与温度之间的关系,考察了在不同温度下零点漂移的情况.在实验中,将690 A 型满量程为133 Pa的电容薄膜真空计作为参考.研究表明,在不同的温度下,两种电容薄膜真空计均有良好的线性,并且与23 ℃情况下的偏差基本与温差成正比.而零点漂移与温度的关系不明显,但总体上呈现随着温差的增加,零点漂移更严重的趋势.Using calibration system to measure 1 torr CDG for ambient laboratory temperature between 15.0℃ and26.1 ℃.The calibration also paid attention to the CDG's zero drifts in the temperature range.In the experiment,we used690 A 133 Pa CDG as a reference standard.The results showed that in the different ambient laboratory temperatures,all the two CDGs exhibited good linearity.The deviation was proportional to temperature.The zero drift had not a clear relationship with temperature.But more temperature difference there is,bigger zero drift appear.

关 键 词：电容薄膜真空计 温度修正 零点漂移 

分 类 号：O484.5[理学—固体物理]