大直径窄环带平面平面度的精确测量  

Precise Measurement of Flatness for Large Diameter Narrow Zone Annular Plane

作　　者：陈宝刚[1] 邵亮[1] 李剑锋[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《光电工程》2015年第8期14-19,共6页Opto-Electronic Engineering

基　　金：中国科学院三期创新重大研究资助项目(O65X32C060)

摘　　要：为了实现大直径窄环带平面平面度的精确测量,提出一种利用内调焦光管结合精密转台的基于光学及图像处理的新方法。首先利用内调焦光管把光纤点光源成像在被测圆环上方,精密转台带动点光源的像点旋转在空间画圆,以此圆所在的平面为基准,用CCD探测器接收点光源像点,根据脱靶量测出被测点与基准平面的距离,然后把测量数据展开成傅里叶级数进行谐波分析,去除常数项及一次项对测量结果的影响,通过数据处理计算即可得到被测环面的平面度。对该方法的基本测量原理进行了研究分析,并结合实例对一外径5 m、内径4.4 m、高0.5 m的圆环零件进行平面度的测量,测得其平面度为0.285 mm,重复性为0.009 3 mm。最后对该方法的测量不确定度进行了分析,其合成标准不确定度为0.007 4 mm。In order to realize the precise measurement of flatness for large diameter narrow zone annular plane, a novel method based on optics and image processing using inner focus collimator and precision rotary table is proposed. Firstly, the image of point light source is projected above the annular plane using inner focus collimator. And the image point is driven by precision rotary table to draw a circle. The circle plane is the reference. The point light source is imaging on the CCD. Then the distance between annular plane and reference plane is measured. Next, the testing data is analyzed by means of Fourier harmonic analysis method. The influence of constant item and the first item is removed. Then the flatness of the annular plane can he calculated by the data processing. The basic principle of the testing method is analyzed. An annular workpiece with the out-diameter of 5 m and the inner-diameter of 4.4 m and the height of 0.5 m is tested with this method. The flatness is 0.285 mm, and the repeatability is 0.009 3 mm. Finally, the measurement uncertainty of this method is analyzed, and the composed standard uncertainty is 0.007 4 ram.

关 键 词：平面度测量 谐波分析 精密转台 内调焦光管 环形平面 

分 类 号：TH706[机械工程—仪器科学与技术]