KDP晶体表面波纹度的分析与研究  

Analysis and Research on KDP Crystal Surface Waviness

作　　者：关佳亮[1] 陈玲[1] 朱磊[1] 朱生根 

机构地区：[1]北京工业大学 [2]北京工研精机股份有限公司

出　　处：《工具技术》2015年第8期87-91,共5页Tool Engineering

基　　金：国家科技重大专项"特殊晶体材料单点金刚石飞刀切削超精密机床"(2011ZX04004-042)

摘　　要：针对工艺参数对KDP晶体表面波纹度值的影响问题,基于二次通用回归旋转组合方法优化KDP晶体单点金刚石飞刀切削工艺参数组合,采用单因素和多因素法分析各因素对表面波纹度的影响规律,并以此为基础优化工艺参数,进行KDP晶体切削实验。试验表明:各因素对表面波纹度的影响程度大小顺序为:进给量二次项、进给量、转速、转速与进给量的交互作用。优化出表面波纹度值最小时的加工工艺参数组合:刀具圆弧半径为9mm;转速为633r/min;进给量为11.8μm/r;背吃刀量为21μm,利用此组工艺参数加工出KDP晶体的表面波纹度为0.02μm。For the problem of waviness of KDP crystals, the process parameters are optimized by quadratic regression rotation method. The affect degree of the parameters on waviness is obtained by univariate and multivariate methods. Based on which the process parameters are optimized and the experiment is taken with optimized parameters. The tests show that the sequence of the factors affecting waviness is feed rate quadratic term, feed rate, speed, speed and feed rate of interac-tion. The partial least squares method and lingo software are used to obtain the optimal process parameters：tool radius of 9 mm; speed of 633r/min;feed rate of 11. 8μm/r;turning back of 21μm. KDP crystal waviness is 0. 02μm with this set of process parameters.

关 键 词：KDP晶体 单点金刚石飞刀切削 二次通用回归旋转组合 波纹度 工艺参数 

分 类 号：TG84[金属学及工艺—公差测量技术] TH161[机械工程—机械制造及自动化]