轴向磁场对电弧离子镀CrN薄膜显微组织及耐腐蚀性能的影响  

Effect of axial magnetic field on microstructure and corrosion properties of CrN films prepared by arc ion plating

作　　者：赵彦辉[1,2] 李天书[3] 于宝海[1] 肖金泉[1] 林国强[2] 

机构地区：[1]中国科学院金属研究所专用材料与器件研究部,沈阳110016 [2]大连理工大学三束材料改性教育部重点实验室,大连116024 [3]中国科学院金属研究所金属腐蚀与防护实验室,沈阳110016

出　　处：《中国有色金属学报》2015年第8期2190-2195,共6页The Chinese Journal of Nonferrous Metals

基　　金：国家自然科学基金资助项目(51171197);大连理工大学三束材料改性教育部重点实验室开放课题资助项目(LABKF1405)

摘　　要：采用磁场增强电弧离子镀技术,通过改变位于靶材后方的轴向磁场强度,在2024Al合金表面沉积CrN薄膜,研究磁场强度对薄膜显微组织、显微硬度及耐腐蚀性能的影响。结果表明:随着磁场强度的增加,CrN薄膜结构由Cr2N与CrN的混合相逐渐转变为CrN的单一相结构;磁场强度对薄膜表面形貌有明显影响,随着磁场强度的增加,薄膜表面小颗粒的数量逐渐减少,较大尺寸颗粒的数量有所增加;CrN薄膜的显微硬度和弹性模量在磁场强度为7960 A/m时达到最大值,分别为23.9 GPa与392.6 GPa;CrN薄膜的阳极极化曲线的腐蚀电位随着磁场强度的增加先增加而后降低,在磁场强度为3184 A/m时,具有最大值,即具有较好的抗腐蚀性。The CrN films were prepared using magnetic field-enhanced arc ion plating on 2024 Al alloy substrates, and the effect of axial magnetic field intensity behind the cathodic target on microstructure, microhardness and corrosion properties of film was investigated. The results show that, with the increase of the magnetic field intensity, the complex structures of CrEN and CrN phase in the CrN films change to single phase of CrN, magnetic field has obvious effect on surface morphologies of film, the number of smaller particles reduces and the number of larger particles increases. When the magnetic field intensity is 7960 A/m, the microhardness and elastic modulus of the films reach the maximum values, which are 23.9 GPa and 392.6 GPa, respectively. The corrosion potentials of polarization curves firstly increase, and then decrease with the increase of the magnetic field intensity. The maximum value of the corrosion potential is obtained at the magnetic field intensity of 3184 A/m, namely, corresponding to the best corrosive resistance.

关 键 词：CRN薄膜 磁场 电弧离子镀 显微组织 耐腐蚀性 

分 类 号：TB43[一般工业技术] TG174[金属学及工艺—金属表面处理]