紫外-远红外超宽谱带高抗反射表面微纳米结构的超快激光制备及功能研究  

Study on Ultrafast Laser Fabrication of UV-FIR Ultra-broad-band Antireflection Surface Micro-Nano Structures and Their Properties

作　　者：范培迅[1,2] 龙江游[1] 江大发 张红军[1] 钟敏霖[1] 

机构地区：[1]清华大学材料学院激光材料加工研究中心先进成形制造教育部重点实验室,北京100084 [2]清华大学精密仪器系,北京100084

出　　处：《中国激光》2015年第8期226-233,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(51210009)

摘　　要：材料表面抗反射特性在太阳能利用、传感、隐身、航天、军事等领域均具有重要应用价值。基于超快皮秒激光与材料的相互作用,在Cu、Al、Ti、H13钢4种金属材料表面制备出独特的微纳米复合结构,实现从紫外-远红外超宽谱带的高抗反射特性。在Al、Ti、H13钢表面制备出的微纳复合结构使该三种金属在紫外-可见-近红外波段的全反射率分别下降到10%、5%、5%。在Cu表面制备出的覆盖发达纳米颗粒的无序多孔嵌套结构在紫外-可见、紫外-近红外、紫外-中红外、以及紫外-远红外的波谱范围内的平均反射率分别下降到3%、6%、9%和10%左右,具有优异的超宽谱带抗反射特性。探讨了超宽谱带抗反射特性的形成机理及与表面微纳米结构之间的关系。Antireflection properties on material surfaces are of great value in many fields including solar utilization,sensing, stealth, aerospace technology, military, etc. Through the interaction of picosecond laser with metallic materials, unique micro/nano hierarchical structures are produced on Cu, Al, Ti, and H13 steel surfaces, realizing significant antireflection properties through the ultra-broad spectrum band from ultraviolet（UV） to infrared（FIR）region. Wherein the total reflectance of the micro/nano structured Al, Ti, and H13 steel surfaces in the UV-VIS-NIR region are reduced down to around 10%, 5%, and 5%, respectively. The average reflectance of the disordered porous structures covered by abundant nanoparticles on Cu surface in the UV-VIS, UV-NIR, UV-MIR, and UV-FIR regions are reduced down to around 3%, 6%, 9%, and 10%, respectively, exhibiting extraordinary ultra- broad- band antireflection property. The formation mechanisms of the ultra-broad-band antireflection property as well as its relationship with surface micro/nano structures are discussed.

关 键 词：激光光学 微纳米结构 超宽谱带 抗反射 皮秒激光 金属 

分 类 号：TN249[电子电信—物理电子学]