Growth of Niobium Thin Films on Si Substrates by Pulsed Nd:YAG Laser Deposition  

作　　者：Francisco Gontad Antonella Lorusso Luigi Solombrino loannis Koutselas Nikos Vainos Alessio Perrone 

机构地区：[1]Department of Mathematics and Physics "E.De Giorgi",and National Institute of Nuclear Physics,University of Salento [2]Department of Materials Science,University of Patras

出　　处：《Journal of Materials Science & Technology》2015年第8期784-789,共6页材料科学技术（英文版）

基　　金：supported partially by the Italian Ministry of Research in the framework of FIRB-Fondo per gli Investimenti della Ricerca di Base(Project no.RBFR12NK5K);the Italian National Institute of Nuclear Physics(INFN)

摘　　要：The growth of Nb thin films on Si（100） substrates by different laser fluences （4-15 J/cm2） was reported, The pulsed Nd：YAG laser deposition （PLD） under influence of laser fluence on ablation rate and deposition rate was discussed. X-ray diffraction （XRD） investigations of the deposited films showed an amorphous structure. The droplet density on the film surface observed by scanning electron microscopy （SEM） analyses was extremely low. It was experimentally proved that the droplets on the film surface originated from liquid phase on the target surface, Profilometric measurements of the deposited Nb films revealed a substantial asymmetry in the film thickness related to the plume deflection effect. The measured electrical resistivity of the Nb film was higher than that of high purity Nb bulk. The present investigations of ablation and deposition process of Nb thin films are related to its potential application in superconducting radio-frequency （SRF） cavities.The growth of Nb thin films on Si（100） substrates by different laser fluences （4-15 J/cm2） was reported, The pulsed Nd：YAG laser deposition （PLD） under influence of laser fluence on ablation rate and deposition rate was discussed. X-ray diffraction （XRD） investigations of the deposited films showed an amorphous structure. The droplet density on the film surface observed by scanning electron microscopy （SEM） analyses was extremely low. It was experimentally proved that the droplets on the film surface originated from liquid phase on the target surface, Profilometric measurements of the deposited Nb films revealed a substantial asymmetry in the film thickness related to the plume deflection effect. The measured electrical resistivity of the Nb film was higher than that of high purity Nb bulk. The present investigations of ablation and deposition process of Nb thin films are related to its potential application in superconducting radio-frequency （SRF） cavities.

关 键 词：Pulsed laser deposition Nb thin films Ablation and deposition rate 

分 类 号：TB306[一般工业技术—材料科学与工程] TB383.2