光纤石英玻璃基板微V槽阵列的精密磨削  

Precision grinding of micro V-groove array on optical fiber quartz glass substrate

作　　者：谢晋[1] 冯彦科 程剑[1] 吴可可[1] 

机构地区：[1]华南理工大学机械与汽车工程学院,广东广州510640

出　　处：《光学精密工程》2015年第8期2243-2249,共7页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.61475046)

摘　　要：针对脆性石英玻璃的微加工,利用自主研发的金刚石砂轮微尖端修整工艺,研发了光纤阵列石英玻璃微V槽磨削技术。分析了60°的微V槽形状偏差对光纤耦合损耗的影响,然后,研究了砂轮微尖端的误差补偿修整工艺。最后,实验分析了微V槽的磨削精度。理论分析显示:微V槽角度、间距和宽度的偏差分别控制在±0.42°、±1.04μm和±1.2μm以内时,耦合损耗小于0.5dB。实验结果表明:开发的数控磨削工艺可加工高精度的60°微V槽阵列;采用数控轨迹和角度补偿修整后,砂轮微尖端半径可平均达到10.46μm,角度精度为(60±0.22)°;对石英玻璃进行微磨削后,微V槽的角度偏差达到0.4°,尖端半径为10.5μm,宽度偏差为0.3μm,间距偏差为0.5μm,可保证光纤阵列的精密对接。As quartz glass is hard to be micro-machined,a self-researched truing technique of diamond wheel micro-tip was utilized to develop the grinding technique of micro V-groove arrays on the quartz glass.The influences of profile errors of 60°micro V-grooves on the coupling losses of optical fibers were analyzed.Then,the error compensation truing for grinding wheel micro-tip was researched.Finally,the grinding accuracy for micro V-grooves on quartz glass was experimentally investigated.The theoretical analysis indicates that when the angle,interval and the width of micro V-groove range±0.42°,±1.04μm and±1.2μm,respectively,the coupling loss is less than 0.5dB.The experimental results show that the Numerical Control（NC）precise grinding technique proposed can machine higher precise arrays,and the the V-tip angle and the radius of trued diamond wheel may reach 10.46μm and（60±0.22）°by NC path and angle compensation truing,respectively.After micro-grinding of quartz glass,the micro V-groove shows an angle error of 0.4°,a tip radius of 10.5μm,a width error of 0.3μm and an interval error of 0.5μm,which assures the precision connection of optical fiber ar-rays.

关 键 词：光纤石英玻璃 光纤阵列 微V槽 微磨削 金刚石砂轮 微尖端 耦合损耗 

分 类 号：TQ171.731[化学工程—玻璃工业] TN305.2[化学工程—硅酸盐工业]