薄膜材料透射电镜截面样品的简单制备方法  

Simple preparation method for TEM cross-sectional specimens of thin-film materials

作　　者：马秀梅[1] 尤力平[1] 

机构地区：[1]北京大学物理学院,电子显微镜实验室,北京100871

出　　处：《电子显微学报》2015年第4期359-362,共4页Journal of Chinese Electron Microscopy Society

摘　　要：针对薄膜材料透射电镜截面样品制备过程复杂、制样成功率低的问题,本文详细介绍了一种操作简单、实用性强的制备方法,采用该方法可以成功制备出脆性衬底上薄膜材料的TEM截面样品。Preparing cross-sectional transmission electron microscope（ TEM） specimens for thin-film materials is very complex and its success rate is very low. A preparation method with a simple operation and a high practicality was introduced. By using this method it could succeed in preparing cross-sectional TEM specimens for thin-film materials grown on brittle substrate.

关 键 词：透射电镜 薄膜材料 截面样品 制样 离子减薄 

分 类 号：TN16[电子电信—物理电子学] TB383.2[一般工业技术—材料科学与工程]