电子束照射电介质厚样品的带电动态特性  

Charging Dynamic Characteristics of the Dielectric Sample under Electron Beam Irradiation

作　　者：汪春华[1] 

机构地区：[1]西安航空学院,西安710077

出　　处：《固体电子学研究与进展》2015年第2期129-134,155,共7页Research & Progress of SSE

摘　　要：采用较为准确的考虑电子散射、输运、俘获以及自洽场的数值计算模型,研究了电子束照射电介质厚样品的动态带电特性,并采用一个实验平台测试样品的电子产额。结果表明,由于电子的迁移和扩散,空间电荷呈现在散射区域内为正、区域外为负的分布特性。随着电子束照射,表面电位逐渐下降并趋于稳定值,电子总产额逐渐增大并趋近于1,暂态过程因此趋于平衡。表面电位随入射电子束能量的增大而下降,随入射电子束电流增大而略微下降。对于不规则表面样品,表面倾斜角度越大,表面电位越高。The charging characteristics of the dielectric sample under electron beam irradiation were studied by applying the numerical model incorporating electron scattering,transport,trapping process and self-consistent field.The electron yield was measured with an experimental platform.Results show that,the space charge is distributed positively within the scattering region,but negatively outside the region due to electron drift and diffusion.With irradiation,the surface potential decreases to a stable value,and the electron total yield increases and approaches to unity,and therefore the transient process tends to equilibrium.The surface potential decreases with the increase of the electron beam energy,and decreases weakly with the increase of the beam current.For the sample with the irregular surface,the surface potential increases with the increase of the tilt angle.

关 键 词：电子产额 空间电荷 空间电位 数值模拟 

分 类 号：TN407[电子电信—微电子学与固体电子学]