影响激光调阻精度的若干因素浅析  

Analysis of Technological Parameters' Influence on the Trimming Resistance Precision

作　　者：寇玉娟 戴思 岳晴瑞 王丽莎 吴垠昊 

机构地区：[1]陕西华经微电子股份有限公司,陕西西安710065 [2]西京电气总公司,陕西西安710065

出　　处：《电子科学技术》2015年第5期525-531,共7页Electronic Science & Technology

摘　　要：本文介绍了激光调阻的基本原理和激光调阻系统,激光调阻工艺流程及工艺参数,调阻程序,切刻类型,分析了切槽缺陷和影响激光调阻精度的若干因素。Laser trimming resistance mechanism and trimming system of thick film hybrid integration circuit were introduced in this paper. Laser trimming resist parameters, trimming resistance program, etching types and ance etch technological process, technological ing notch defect were also discussed The influence of laser trimming resistance technological parameters on the trimming resistance value precision were analysed in detail.

关 键 词：激光调阻 激光脉冲 激光切刻 切槽缺陷 调阻精度 

分 类 号：TN41[电子电信—微电子学与固体电子学] TN249