面向大流量应用的硅微阀致动器优化设计  

Optimization design of actuator in silicon micro-valve for large flow applications

作　　者：李勇俊[1] 张胜昌 段飞 邓宁[1] 

机构地区：[1]清华大学微电子与纳电子学系,北京100084 [2]盾安人工环境股份有限公司,浙江杭州310051

出　　处：《传感器与微系统》2015年第9期80-82,86,共4页Transducer and Microsystem Technologies

摘　　要：设计了一种面向大流量应用的硅微阀流控芯片,基于电热耦合理论对芯片中的V型电热致动器进行了优化设计。通过构建温度分布的优化模型,对硅微阀流控芯片中V型致动器进行了变截面设计,并对优化前后的致动器进行了多物理场模拟。结果表明:与恒定截面V型致动器相比,在致动位移相同的情况下,优化后的致动器所需的最高温升降低了7.14%,且温度和应力分布更为均匀,在保障致动性能的同时提高了热平衡稳定性和结构稳定性。Design a silicon micro-valve-based micro-fluidic chip and optimal design of V-shape actuator is carried out based on electro-thermal coupling theory. By constructing the optimal model for temperature distribution,the V-shape electro-thermal micro-actuator with variable section is designed for micro fluidic silicon micro-valves,and multi-physical field simulation is carried out on actuator after optimization. Results show that compared with actuators with constant section,for same displacement,the required highest temperature rise of the optimized actuator is reduced by 7. 14 %,it shows more uniform distributions of temperature and stress in which means better thermal equilibrium and structural stability.

关 键 词：硅微型阀 V型致动器 电热耦合 

分 类 号：TH703[机械工程—仪器科学与技术] TP64[机械工程—精密仪器及机械]