Cr-Si-C-N系统中含Cr氮化物薄膜的结构及其摩擦学特性研究进展  

Progress in Microstructure and Tribological Properties of CrN-Based Films in the Cr-Si-C-N System

作　　者：李子骏[1,2] 吴志威[1,2] 高宋 孔继周[1,2] 周飞[1,2] 

机构地区：[1]南京航空航天大学机械结构力学及控制国家重点实验室,江苏南京210016 [2]南京航空航天大学机电学院和江苏省精密与微细制造技术重点实验室,江苏南京210016

出　　处：《润滑与密封》2015年第9期128-136,156,共10页Lubrication Engineering

基　　金：国家自然科学基金项目(51375231);高等学校博士学科点专项科研基金项目(20133218110030);江苏省高校优势学科建设工程项目

摘　　要：目前广泛应用的含Cr的薄膜有Cr N薄膜,以及以Cr N薄膜为基础,通过添加Si和C元素形成的Cr Si N薄膜、Cr CN薄膜和Cr Si CN薄膜。综述上述4种薄膜的结构及其力学和摩擦学特性的研究进展,阐述在不同摩擦环境下掺杂元素含量对薄膜摩擦因数和磨损率的影响,指出Si和C元素的掺杂均能改善Cr N薄膜的摩擦学性能,并从结构角度分析其原因。The coatings containing Cr that are widely used now include CrN coatings, and the CrN-based coatings formed through adding Si and C elements ,such as CrSiN, CrCN and CrSiCN coatings.The microstructure and tribological properties of above four kinds of coatings were reviewed.The influence of Si and C element content on the microstructure and tribological properties of coatings was analyzed.It was pointed out that the addition of Si and C elements could enhance the mechanical properties of CrN-based coatings, and the reasons were analyzed from the perspective of the microstructure of CrN- based coatings.

关 键 词：Cr-Si-C-N系统 CrN基薄膜 微观结构 摩擦 磨损 

分 类 号：TH117.1[机械工程—机械设计及理论]