多晶硅装置用氢气压缩机设计分析  

作　　者：赵玉忱 潘峰[1] 张士永[1] 金鑫[1] 

机构地区：[1]沈阳远大压缩机股份有限公司,辽宁沈阳110027

出　　处：《中国科技纵横》2015年第19期31-32,共2页China Science & Technology Overview

摘　　要：生产出符合太阳能级或电子级要求的多晶硅要求氢气介质的纯度极高,不允许掺入任何杂质或其它气体.为保证多晶硅氢气压缩机工作时介质的纯度,使润滑油、水等杂质不与介质接触,本文在设计阶段开展了多晶硅氢气压缩机的密封、腐蚀等方面的研究工作,经过充分研究、论证和分析,得出了在设计阶段需要关注和解决的设计和工艺问题的关键所在,为设计满足使用要求的多晶硅氢气压缩机提供了保证.In recent years, with the rapid development of science and technology, polysilicon industry entered the stage of rapid growth of polysilicon industry in China has entered a new development platform.For meet the needs of the polycrystaline silicon solar energy level or electronic level, the purity of hydrogen gas medium is extremely high, does not allow mixed with any impurities or other gases, we adopted polysilicon hydrogen compressor design. Polysilicon hydrogen compressor design should not only guarantee the purity of medium, the lubricating oil, water and other impurities not contact with the media, but also guarantee the sealing of the process of medium makes it no lubricating oil or environmental polution.But also in the design of back problems and matters need to pay attention to, in this paper, the polysilicon hydrogen compressor design were discussed, and some matters needing attention.

关 键 词：多晶硅压缩机 填料 接筒 刮油器 冷却器 

分 类 号：TU723.3[建筑科学—建筑技术科学]